{"id":218,"date":"2025-05-06T09:59:59","date_gmt":"2025-05-06T00:59:59","guid":{"rendered":"https:\/\/www.shin-ichi.org\/?p=218"},"modified":"2025-07-31T11:31:59","modified_gmt":"2025-07-31T02:31:59","slug":"%e3%80%8e%e5%9c%a7%e5%8a%9b%e3%82%bb%e3%83%b3%e3%82%b5%e3%80%8f%e3%81%ab%e3%81%a4%e3%81%84%e3%81%a6llm%e3%81%ab%e8%81%9e%e3%81%84%e3%81%a6%e3%81%bf%e3%81%9f-ai%e3%81%8c%e5%b0%8e%e3%81%8f","status":"publish","type":"post","link":"https:\/\/www.shin-ichi.org\/?p=218","title":{"rendered":"\u300e\u5727\u529b\u30bb\u30f3\u30b5\u300f\u306b\u3064\u3044\u3066LLM\u306b\u805e\u3044\u3066\u307f\u305f\u2014AI\u304c\u5c0e\u304f\u7814\u7a76\u30e1\u30e2"},"content":{"rendered":"\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u3068\u306f\u3001\u6c17\u4f53\u3084\u6db2\u4f53\u306e\u5727\u529b\u3092\u30c0\u30a4\u30e4\u30d5\u30e9\u30e0\uff08\u8584\u3044\u819c\u72b6\u306e\u90e8\u54c1\uff09\u3092\u4ecb\u3057\u3066\u691c\u77e5\u3057\u3001\u96fb\u6c17\u4fe1\u53f7\u306b\u5909\u63db\u3057\u3066\u51fa\u529b\u3059\u308b\u88c5\u7f6e\u3067\u3059\u3002\u672c\u30ec\u30dd\u30fc\u30c8\u3067\u306f\u3001\u5727\u529b\u30bb\u30f3\u30b5\u306e\u6b74\u53f2\u304b\u3089\u9078\u5b9a\u65b9\u6cd5\u3001\u4f7f\u3044\u65b9\u307e\u3067\u5e45\u5e83\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u203b\u672c\u30da\u30fc\u30b8\u306f\u3001AI\u306e\u6d3b\u7528\u3084\u7814\u7a76\u306b\u95a2\u9023\u3059\u308b\u539f\u7406\u30fb\u6a5f\u5668\u30fb\u30c7\u30d0\u30a4\u30b9\u306b\u3064\u3044\u3066\u5b66\u3076\u305f\u3081\u306b\u3001\u500b\u4eba\u7684\u306b\u6574\u7406\u30fb\u8a18\u8ff0\u3057\u3066\u3044\u308b\u3082\u306e\u3067\u3059\u3002\u5185\u5bb9\u306b\u306f\u8aa4\u308a\u3084\u898b\u843d\u3068\u3057\u304c\u542b\u307e\u308c\u3066\u3044\u308b\u53ef\u80fd\u6027\u3082\u3042\u308a\u307e\u3059\u306e\u3067\u3001\u3082\u3057\u304a\u6c17\u3065\u304d\u306e\u70b9\u3084\u3054\u52a9\u8a00\u7b49\u3054\u3056\u3044\u307e\u3057\u305f\u3089\u3001\u3054\u9023\u7d61\u3044\u305f\u3060\u3051\u307e\u3059\u3068\u5e78\u3044\u3067\u3059\u3002<\/strong><\/p>\n\n\n\n<p><strong>\u203b\u672c\u30da\u30fc\u30b8\u306e\u5185\u5bb9\u306f\u3001\u500b\u4eba\u7684\u306a\u5b66\u7fd2\u304a\u3088\u3073\u60c5\u5831\u6574\u7406\u3092\u76ee\u7684\u3068\u3057\u3066\u63d0\u4f9b\u3057\u3066\u3044\u308b\u3082\u306e\u3067\u3042\u308a\u3001\u305d\u306e\u6b63\u78ba\u6027\u3001\u5b8c\u5168\u6027\u3001\u6709\u7528\u6027\u7b49\u306b\u3064\u3044\u3066\u3044\u304b\u306a\u308b\u4fdd\u8a3c\u3082\u884c\u3044\u307e\u305b\u3093\u3002\u672c\u30da\u30fc\u30b8\u306e\u60c5\u5831\u3092\u5229\u7528\u3057\u305f\u3053\u3068\u3001\u307e\u305f\u306f\u5229\u7528\u3067\u304d\u306a\u304b\u3063\u305f\u3053\u3068\u306b\u3088\u3063\u3066\u767a\u751f\u3057\u305f\u640d\u5bb3\uff08\u76f4\u63a5\u7684\u30fb\u9593\u63a5\u7684\u30fb\u7279\u5225\u30fb\u5076\u767a\u7684\u30fb\u7d50\u679c\u7684\u640d\u5bb3\u3092\u542b\u307f\u307e\u3059\u304c\u3001\u3053\u308c\u3089\u306b\u9650\u308a\u307e\u305b\u3093\uff09\u306b\u3064\u3044\u3066\u3001\u5f53\u65b9\u306f\u4e00\u5207\u8cac\u4efb\u3092\u8ca0\u3044\u307e\u305b\u3093\u3002\u3054\u5229\u7528\u306f\u5229\u7528\u8005\u3054\u81ea\u8eab\u306e\u8cac\u4efb\u3067\u304a\u9858\u3044\u3044\u305f\u3057\u307e\u3059\u3002<\/strong><\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>1. \u5727\u529b\u30bb\u30f3\u30b5\u306e\u6b74\u53f2<\/strong><\/h2>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>1.1 \u5727\u529b\u8a08\u6e2c\u306e\u8d77\u6e90<\/strong><\/h3>\n\n\n\n<p>\u5727\u529b\u8a08\u6e2c\u306e\u8d77\u6e90\u306f17\u4e16\u7d00\u3001\u30a4\u30bf\u30ea\u30a2\u306e\u30a8\u30f4\u30a1\u30f3\u30b8\u30a7\u30ea\u30b9\u30bf\u30fb\u30c8\u30ea\u30c1\u30a7\u30ea\uff081608-1647\uff09\u304c\u767a\u660e\u3057\u305f\u300c\u6c34\u9280\u6c17\u5727\u8a08\u300d\u306b\u3055\u304b\u306e\u307c\u308a\u307e\u3059\u3002\u30c8\u30ea\u30c1\u30a7\u30ea\u306f\u4e00\u7aef\u3092\u9589\u3058\u305f\u30ac\u30e9\u30b9\u7ba1\u306b\u6c34\u9280\u3092\u5165\u308c\u3001\u305d\u308c\u3092\u6c34\u9280\u306e\u5165\u3063\u305f\u9262\u306b\u9006\u3055\u306b\u7acb\u3066\u308b\u5b9f\u9a13\u3092\u884c\u3044\u3001\u4e16\u754c\u3067\u521d\u3081\u3066\u771f\u7a7a\u306e\u5b9f\u5728\u3092\u79d1\u5b66\u7684\u306b\u8a3c\u660e\u3057\u307e\u3057\u305f<a href=\"https:\/\/sts.kahaku.go.jp\/diversity\/document\/system\/pdf\/062.pdf\">2<\/a>\u3002\u3053\u306e\u767a\u660e\u306b\u3088\u308a\u3001\u30c8\u30ea\u30c1\u30a7\u30ea\u306f\u300c\u771f\u7a7a\u306e\u7236\u300d\u3068\u547c\u3070\u308c\u3001\u771f\u7a7a\u306e\u5358\u4f4d\u300c\u30c8\u30eb\uff08Torr\uff09\u300d\u3082\u5f7c\u306e\u540d\u306b\u7531\u6765\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>1.2 \u5727\u529b\u8a08\u6e2c\u6280\u8853\u306e\u767a\u5c55<\/strong><\/h2>\n\n\n\n<p>18\u4e16\u7d00\u304b\u308919\u4e16\u7d00\u306b\u304b\u3051\u3066\u3001\u5727\u529b\u8a08\u6e2c\u6280\u8853\u306f\u5927\u304d\u304f\u767a\u5c55\u3057\u307e\u3057\u305f\u3002\u30c9\u30a4\u30c4\u3067\u306f\u300c\u91cd\u9318\u5f62\u5727\u529b\u8a08\u300d\uff08\u30d4\u30b9\u30c8\u30f3\u3068\u91cd\u9318\u3067\u30b7\u30ea\u30f3\u30c0\u306b\u5727\u529b\u3092\u767a\u751f\u3055\u305b\u308b\u88c5\u7f6e\uff09\u304c\u958b\u767a\u3055\u308c\u3001\u30d5\u30e9\u30f3\u30b9\u3067\u306f\u91d1\u5c5e\u306e\u5f3e\u6027\u3092\u5229\u7528\u3057\u305f\u300c\u30a2\u30cd\u30ed\u30a4\u30c9\u5f62\u6c17\u5727\u8a08\u300d\u3068\u300c\u30d6\u30eb\u30c9\u30f3\u7ba1\u5727\u529b\u8a08\u300d\u304c\u767a\u660e\u3055\u308c\u307e\u3057\u305f\u3002\u30a4\u30ae\u30ea\u30b9\u3067\u306f\u30d4\u30b9\u30c8\u30f3\u3068\u3070\u306d\u3092\u7528\u3044\u305f\u8a18\u9332\u5f0f\u5727\u529b\u8a08\u300c\u30a8\u30f3\u30b8\u30f3\u30a4\u30f3\u30b8\u30b1\u30fc\u30bf\u300d\u306e\u539f\u578b\u304c\u958b\u767a\u3055\u308c\u307e\u3057\u305f<a href=\"https:\/\/sts.kahaku.go.jp\/diversity\/document\/system\/pdf\/062.pdf\">2<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>1.3 \u534a\u5c0e\u4f53\u5727\u529b\u30bb\u30f3\u30b5\u306e\u8a95\u751f<\/strong><\/h3>\n\n\n\n<p>\u73fe\u4ee3\u306e\u5727\u529b\u30bb\u30f3\u30b5\u306e\u539f\u70b9\u3068\u306a\u308b\u534a\u5c0e\u4f53\u5727\u529b\u30bb\u30f3\u30b5\u306e\u6b74\u53f2\u306f\u30011964\u5e74\u306b\u8c4a\u7530\u4e2d\u592e\u7814\u7a76\u6240\u306e\u4e94\u5341\u5d50\u3089\u306b\u3088\u3063\u3066\u767a\u8868\u3055\u308c\u305f\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u534a\u5c0e\u4f53\u3072\u305a\u307f\u30b2\u30fc\u30b8\u3092\u91d1\u5c5e\u30c0\u30a4\u30e4\u30d5\u30e9\u30e0\u306b\u63a5\u7740\u3057\u3001\u5727\u529b\u5909\u5316\u306b\u3088\u3063\u3066\u767a\u751f\u3059\u308b\u3072\u305a\u307f\u306e\u5909\u5316\u3092\u96fb\u6c17\u4fe1\u53f7\u306b\u5909\u63db\u3059\u308b\u88c5\u7f6e\u304c\u59cb\u307e\u308a\u3068\u3055\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.denso.com\/jp\/ja\/-\/media\/global\/business\/innovation\/review\/17\/17-doc-3-ja.pdf\">18<\/a><a href=\"https:\/\/www.ieice-hbkb.org\/files\/10\/10gun_08hen_02.pdf\">19<\/a>\u3002<\/p>\n\n\n\n<p>\u5f53\u521d\u306f\u91d1\u5c5e\u30c0\u30a4\u30e4\u30d5\u30e9\u30e0\u306b\u534a\u5c0e\u4f53\u3072\u305a\u307f\u30b2\u30fc\u30b8\u3092\u6709\u6a5f\u63a5\u7740\u5264\u3067\u63a5\u7740\u3057\u3001\u30ea\u30fc\u30c9\u7dda\u53d6\u51fa\u3057\u3092\u306f\u3093\u3060\u4ed8\u3051\u3067\u884c\u3046\u306a\u3069\u4fe1\u983c\u6027\u306b\u306f\u8ab2\u984c\u304c\u3042\u308a\u307e\u3057\u305f\u304c\u3001\u5c0f\u578b\u30fb\u9ad8\u611f\u5ea6\u5316\u306e\u53ef\u80fd\u6027\u3092\u793a\u3057\u307e\u3057\u305f<a href=\"https:\/\/www.denso.com\/jp\/ja\/-\/media\/global\/business\/innovation\/review\/17\/17-doc-3-ja.pdf\">18<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>1.4 MEMS\u6280\u8853\u3078\u306e\u767a\u5c55<\/strong><\/h3>\n\n\n\n<p>1980\u5e74\u4ee3\u4ee5\u964d\u3001\u30b7\u30ea\u30b3\u30f3\u30d7\u30ec\u30fc\u30ca\u6280\u8853\u3092\u5fdc\u7528\u3057\u3001\u8907\u6570\u306e\u534a\u5c0e\u4f53\u3072\u305a\u307f\u30b2\u30fc\u30b8\uff08\u30d4\u30a8\u30be\u62b5\u6297\u7d20\u5b50\uff09\u3092\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u4e0a\u306b\u96c6\u7a4d\u3059\u308b\u62e1\u6563\u578b\u5727\u529b\u30bb\u30f3\u30b5\u304c\u958b\u767a\u3055\u308c\u307e\u3057\u305f<a href=\"https:\/\/www.denso.com\/jp\/ja\/-\/media\/global\/business\/innovation\/review\/17\/17-doc-3-ja.pdf\">18<\/a>\u3002\u3053\u308c\u306f\u73fe\u5728\u306eMEMS\uff08Micro Electro Mechanical Systems\uff09\u6280\u8853\u306e\u539f\u70b9\u3068\u3082\u8a00\u3048\u308b\u3082\u306e\u3067\u3059\u3002\u5727\u529b\u30bb\u30f3\u30b5\u306f\u300c\u6700\u521d\u306eMEMS\u300d\u3067\u3042\u308b\u3068\u8003\u3048\u3089\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.ieice-hbkb.org\/files\/10\/10gun_08hen_02.pdf\">19<\/a>\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>2. \u5727\u529b\u30bb\u30f3\u30b5\u306e\u7a2e\u985e<\/strong><\/h2>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u306b\u306f\u3001\u6e2c\u5b9a\u539f\u7406\u3084\u69cb\u9020\u306e\u9055\u3044\u306b\u3088\u3063\u3066\u69d8\u3005\u306a\u7a2e\u985e\u304c\u3042\u308a\u307e\u3059\u3002\u305d\u308c\u305e\u308c\u7279\u5fb4\u304c\u3042\u308a\u3001\u7528\u9014\u306b\u5fdc\u3058\u3066\u9078\u629e\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>2.1 \u6e2c\u5b9a\u539f\u7406\u306b\u3088\u308b\u5206\u985e<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.1.1 \u62b5\u6297\u819c\u65b9\u5f0f\uff08\u3072\u305a\u307f\u30b2\u30fc\u30b8\u5f0f\uff09<\/strong><\/h4>\n\n\n\n<p>\u6e2c\u5b9a\u5a92\u4f53\u306e\u5727\u529b\u5909\u5316\u3092\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u306b\u53d6\u308a\u4ed8\u3051\u305f\u6b6a\u307f\u30b2\u30fc\u30b8\u306e\u96fb\u6c17\u62b5\u6297\u306e\u5909\u5316\u306b\u3088\u3063\u3066\u6e2c\u5b9a\u3059\u308b\u65b9\u5f0f\u3067\u3059\u3002\u6b6a\u307f\u30b2\u30fc\u30b8\u306b\u306f\u3001\u91d1\u5c5e\u62b5\u6297\u7d20\u5b50\u3001\u30bb\u30e9\u30df\u30c3\u30af\u62b5\u6297\u7d20\u5b50\u3001\u30d4\u30a8\u30be\u62b5\u6297\u7d20\u5b50\u306a\u3069\u304c\u7528\u3044\u3089\u308c\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<p>\u91d1\u5c5e\u62b5\u6297\u7d20\u5b50\u306f\u30bb\u30e9\u30df\u30c3\u30af\u62b5\u6297\u7d20\u5b50\u306b\u6bd4\u3079\u3066\u9ad8\u3044\u5727\u529b\u7bc4\u56f2\u3092\u6e2c\u5b9a\u3067\u304d\u3001\u8010\u4e45\u6027\u306b\u512a\u308c\u3066\u3044\u307e\u3059\u3002\u30d4\u30a8\u30be\u62b5\u6297\u7d20\u5b50\u306f\u91d1\u5c5e\u62b5\u6297\u7d20\u5b50\u3088\u308a\u3082\u5c0f\u3055\u306a\u5727\u529b\u5909\u5316\u3092\u6e2c\u5b9a\u3067\u304d\u308b\u305f\u3081\u3001\u4f4e\u3044\u5727\u529b\u7bc4\u56f2\u3067\u7528\u3044\u3089\u308c\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.1.2 \u9759\u96fb\u5bb9\u91cf\u65b9\u5f0f<\/strong><\/h4>\n\n\n\n<p>\u5727\u529b\u5909\u5316\u306b\u3088\u3063\u3066\u305f\u308f\u3093\u3060\u677f\u306e\u9759\u96fb\u5bb9\u91cf\u306e\u5909\u5316\u306b\u3088\u3063\u3066\u5727\u529b\u3092\u6e2c\u5b9a\u3059\u308b\u65b9\u5f0f\u3067\u3059\u3002\u9759\u96fb\u5bb9\u91cf\u5f62\u5727\u529b\u30bb\u30f3\u30b5\u306f\u3001\u30ac\u30e9\u30b9\u306e\u56fa\u5b9a\u6975\u3068\u30b7\u30ea\u30b3\u30f3\u306e\u53ef\u52d5\u6975\u3092\u5bfe\u5411\u3055\u305b\u3066\u30b3\u30f3\u30c7\u30f3\u30b5\u3092\u5f62\u6210\u3057\u3001\u5916\u90e8\u304b\u3089\u306e\u529b\uff08\u5727\u529b\uff09\u306b\u3088\u3063\u3066\u53ef\u52d5\u6975\u304c\u5909\u5f62\u3057\u3066\u767a\u751f\u3059\u308b\u9759\u96fb\u5bb9\u91cf\u306e\u5909\u5316\u3092\u96fb\u6c17\u4fe1\u53f7\u306b\u5909\u63db\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a>\u3002<\/p>\n\n\n\n<p>\u62b5\u6297\u819c\u65b9\u5f0f\u306b\u6bd4\u3079\u308b\u3068\u9ad8\u611f\u5ea6\u3067100Pa\u4ee5\u4e0b\u306e\u5fae\u5c0f\u306a\u5727\u529b\u5909\u5316\u3092\u6e2c\u5b9a\u3067\u304d\u308b\u4e00\u65b9\u3067\u300170MPa\u304f\u3089\u3044\u307e\u3067\u306e\u5e45\u5e83\u3044\u5727\u529b\u3092\u6e2c\u5b9a\u3067\u304d\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u6750\u6599\u3084\u63a5\u5408\u30fb\u30b7\u30fc\u30eb\u306a\u3069\u306e\u5236\u7d04\u304c\u3042\u308a\u3001\u7528\u9014\u304c\u9650\u5b9a\u3055\u308c\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.1.3 \u5727\u96fb\u7d20\u5b50\u65b9\u5f0f<\/strong><\/h4>\n\n\n\n<p>\u6c34\u6676\u306a\u3069\u5727\u529b\u3092\u304b\u3051\u308b\u3068\u8868\u9762\u306b\u96fb\u8377\u304c\u767a\u751f\u3059\u308b\u5727\u96fb\u4f53\u3092\u5229\u7528\u3057\u305f\u65b9\u5f0f\u3067\u3059\u3002\u96fb\u8377\u306e\u5927\u304d\u3055\u306f\u52a0\u3048\u3089\u308c\u305f\u529b\u306b\u6bd4\u4f8b\u3057\u3001\u6975\u6027\u306f\u305d\u306e\u65b9\u5411\u3092\u8868\u3057\u307e\u3059\u3002\u96fb\u8377\u306f\u5727\u529b\u306e\u5909\u5316\u306b\u5fdc\u3058\u3066\u7d20\u65e9\u304f\u84c4\u7a4d\u30fb\u6d88\u6ec5\u3059\u308b\u305f\u3081\u3001\u9ad8\u901f\u3067\u5909\u5316\u3059\u308b\u52d5\u5727\u3067\u3082\u6b63\u78ba\u306b\u6e2c\u5b9a\u3067\u304d\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<p>\u5727\u96fb\u7d20\u5b50\u65b9\u5f0f\u306b\u306f\u3001\u4f4e\u6d88\u8cbb\u96fb\u529b\u3067\u8010\u4e45\u6027\u306b\u512a\u308c\u3066\u3044\u308b\u307b\u304b\u3001\u9ad8\u6e29\u306b\u3082\u8010\u3048\u3089\u308c\u308b\u7d20\u6750\u3067\u3042\u308b\u3068\u3044\u3046\u5229\u70b9\u304c\u3042\u308a\u307e\u3059\u3002\u4e00\u65b9\u3067\u3001\u632f\u52d5\u3084\u52a0\u901f\u5ea6\u5909\u5316\u306b\u5bfe\u3057\u3066\u654f\u611f\u306a\u306e\u3067\u3001\u7528\u9014\u304c\u5236\u9650\u3055\u308c\u3066\u3057\u307e\u3046\u3068\u3044\u3046\u6b20\u70b9\u304c\u3042\u308a\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.1.4 \u5149\u5b66\u65b9\u5f0f<\/strong><\/h4>\n\n\n\n<p>\u5e72\u6e09\u8a08\u3092\u5229\u7528\u3057\u3066\u5149\u30d5\u30a1\u30a4\u30d0\u30fc\u306e\u5727\u529b\u5909\u5316\u3092\u6e2c\u5b9a\u3059\u308b\u65b9\u5f0f\u3067\u3059\u3002\u96fb\u78c1\u6ce2\u306e\u5e72\u6e09\u3092\u53d7\u3051\u306a\u3044\u306e\u3067\u3001\u9a12\u97f3\u306e\u591a\u3044\u74b0\u5883\u3084\u653e\u5c04\u7dda\u64ae\u5f71\u88c5\u7f6e\u306a\u3069\u306e\u767a\u751f\u6e90\u306e\u8fd1\u304f\u3067\u4f7f\u7528\u3059\u308b\u306e\u306b\u9069\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<p>\u5149\u5b66\u65b9\u5f0f\u306e\u5727\u529b\u30bb\u30f3\u30b5\u306f\u3001\u5c0f\u578b\u3067\u67d4\u8edf\u6027\u304c\u3042\u308b\u305f\u3081\u3001\u4ed6\u306e\u6280\u8853\u3067\u306f\u8a2d\u7f6e\u304c\u56f0\u96e3\u306a\u5834\u6240\u306b\u3082\u8a2d\u7f6e\u3067\u304d\u308b\u3068\u3044\u3046\u5229\u70b9\u304c\u3042\u308a\u307e\u3059\u3002\u307e\u305f\u3001\u96fb\u6e90\u78ba\u4fdd\u304c\u56f0\u96e3\u306a\u5834\u9762\u3067\u3082\u6d3b\u8e8d\u3067\u304d\u307e\u3059\u3002\u4e00\u65b9\u3067\u3001\u30b5\u30a4\u30ba\u304c\u5c0f\u3055\u3044\u305f\u3081\u3001\u4ed6\u306e\u30bb\u30f3\u30b5\u306b\u6bd4\u3079\u3066\u5805\u7262\u6027\u30fb\u8010\u4e45\u6027\u306b\u6b20\u3051\u308b\u3068\u3044\u3046\u6b20\u70b9\u304c\u3042\u308a\u307e\u3059\u3002\u307e\u305f\u3001\u9ad8\u611f\u5ea6\u3067\u3042\u308b\u304c\u3086\u3048\u306b\u3001\u97f3\u97ff\u632f\u52d5\u3084\u6a5f\u68b0\u632f\u52d5\u306e\u5f71\u97ff\u3092\u53d7\u3051\u3084\u3059\u304f\u306a\u308a\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>2.2 \u5727\u529b\u306e\u7a2e\u985e\u306b\u3088\u308b\u5206\u985e<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.2.1 \u30b2\u30fc\u30b8\u5727\u30bb\u30f3\u30b5<\/strong><\/h4>\n\n\n\n<p>\u5927\u6c17\u5727\u3092\u57fa\u6e96\uff08\u30bc\u30ed\u70b9\uff09\u3068\u3057\u3066\u3001\u305d\u308c\u3088\u308a\u9ad8\u3044\u5727\u529b\uff08\u6b63\u5727\uff09\u307e\u305f\u306f\u4f4e\u3044\u5727\u529b\uff08\u8ca0\u5727\uff09\u3092\u6e2c\u5b9a\u3059\u308b\u30bb\u30f3\u30b5\u3067\u3059\u3002\u4e00\u822c\u7684\u306a\u7528\u9014\u306b\u6700\u3082\u5e83\u304f\u4f7f\u308f\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a><a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">9<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.2.2 \u7d76\u5bfe\u5727\u30bb\u30f3\u30b5<\/strong><\/h4>\n\n\n\n<p>\u5b8c\u5168\u771f\u7a7a\uff08\u7d76\u5bfe\u96f6\u5727\uff09\u3092\u57fa\u6e96\u3068\u3057\u3066\u6e2c\u5b9a\u3059\u308b\u30bb\u30f3\u30b5\u3067\u3059\u3002\u5927\u6c17\u5727\u306e\u5f71\u97ff\u3092\u53d7\u3051\u306a\u3044\u6e2c\u5b9a\u304c\u5fc5\u8981\u306a\u5834\u5408\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059<a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a><a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">9<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.2.3 \u5dee\u5727\u30bb\u30f3\u30b5<\/strong><\/h4>\n\n\n\n<p>\u4e8c\u3064\u306e\u5727\u529b\u306e\u5dee\u3092\u6e2c\u5b9a\u3059\u308b\u30bb\u30f3\u30b5\u3067\u3059\u3002\u6d41\u91cf\u8a08\u6e2c\u3084\u6db2\u9762\u30ec\u30d9\u30eb\u6e2c\u5b9a\u306a\u3069\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">9<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>2.3 \u69cb\u9020\u30fb\u5f62\u72b6\u306b\u3088\u308b\u5206\u985e<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.3.1 \u6c4e\u7528\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u5f62<\/strong><\/h4>\n\n\n\n<p>\u4e00\u822c\u7684\u306a\u5727\u529b\u6e2c\u5b9a\u306b\u7528\u3044\u3089\u308c\u308b\u6a19\u6e96\u7684\u306a\u5f62\u72b6\u306e\u30bb\u30f3\u30b5\u3067\u3059\u3002\u69d8\u3005\u306a\u5727\u529b\u7bc4\u56f2\u306b\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.3.2 \u5148\u7aef\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u5f62<\/strong><\/h4>\n\n\n\n<p>\u6e2c\u5b9a\u30dd\u30a4\u30f3\u30c8\u304c\u72ed\u3044\u5834\u6240\u3084\u3001\u56fa\u5f62\u7269\u3092\u542b\u3080\u6e2c\u5b9a\u5bfe\u8c61\u306b\u9069\u3057\u305f\u5f62\u72b6\u306e\u30bb\u30f3\u30b5\u3067\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.3.3 \u30b5\u30cb\u30bf\u30ea\u5f62<\/strong><\/h4>\n\n\n\n<p>\u98df\u54c1\u30fb\u98f2\u6599\u30fb\u533b\u85ac\u54c1\u306a\u3069\u885b\u751f\u7ba1\u7406\u304c\u91cd\u8981\u306a\u5206\u91ce\u3067\u4f7f\u7528\u3055\u308c\u308b\u3001\u6d17\u6d44\u304c\u5bb9\u6613\u306a\u69cb\u9020\u306e\u30bb\u30f3\u30b5\u3067\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">9<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>2.3.4 MEMS\u5f62<\/strong><\/h4>\n\n\n\n<p>MEMS\u306fMicro Electro-Mechanical Systems\u306e\u7565\u3067\u3001\u5727\u96fb\u7d20\u5b50\u3084\u9759\u96fb\u5bb9\u91cf\u65b9\u5f0f\u306e\u5727\u529b\u691c\u51fa\u6a5f\u69cb\u3092\u30b7\u30ea\u30b3\u30f3\u30c1\u30c3\u30d7\u4e0a\u306b\u30df\u30af\u30ed\u30f3\u5358\u4f4d\u3067\u8a2d\u7f6e\u3057\u305f\u8d85\u5c0f\u578b\u306e\u5727\u529b\u30bb\u30f3\u30b5\u3067\u3059\u3002\u4e00\u822c\u7684\u306b\u306f2\uff5e3mm\u7a0b\u5ea6\u306e\u5c0f\u3055\u306a\u8868\u9762\u306b\u5b9f\u88c5\u3055\u308c\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<p>MEMS\u30bb\u30f3\u30b5\u306f\u3001\u5c0f\u578b\u3067\u6d88\u8cbb\u96fb\u529b\u3092\u304a\u3055\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u5c0f\u578b\u30d0\u30c3\u30c6\u30ea\u30fc\u306b\u3088\u3063\u3066\u6570\u5e74\u9593\u99c6\u52d5\u3055\u305b\u308b\u3053\u3068\u3082\u3067\u304d\u307e\u3059\u3002\u30b5\u30a4\u30ba\u304c\u975e\u5e38\u306b\u5c0f\u3055\u304f\u3067\u304d\u3001\u308f\u305a\u304b\u306a\u5727\u529b\u306e\u5909\u5316\u306b\u3082\u7d20\u65e9\u304f\u53cd\u5fdc\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u307b\u304b\u3001\u57cb\u3081\u8fbc\u307f\u578b\u533b\u7642\u6a5f\u5668\u306a\u3069\u306e\u5206\u91ce\u306b\u3082\u5fdc\u7528\u3067\u304d\u308b\u5727\u529b\u30bb\u30f3\u30b5\u3067\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>3. \u5727\u529b\u30bb\u30f3\u30b5\u306e\u539f\u7406<\/strong><\/h2>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u306e\u52d5\u4f5c\u539f\u7406\u306f\u3001\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u691c\u51fa\u65b9\u5f0f\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u3002\u4ee5\u4e0b\u3067\u306f\u3001\u4e3b\u8981\u306a\u5727\u529b\u30bb\u30f3\u30b5\u306e\u52d5\u4f5c\u539f\u7406\u306b\u3064\u3044\u3066\u8aac\u660e\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>3.1 \u30d4\u30a8\u30be\u62b5\u6297\u52b9\u679c\u306e\u539f\u7406<\/strong><\/h3>\n\n\n\n<p>\u30d4\u30a8\u30be\u62b5\u6297\u52b9\u679c\u3068\u306f\u3001\u6a5f\u68b0\u7684\u306a\u529b\u304c\u52a0\u308f\u308b\u3053\u3068\u3067\u3001\u96fb\u6c17\u62b5\u6297\u5024\u304c\u5909\u308f\u308b\u73fe\u8c61\u3092\u6307\u3057\u307e\u3059\u3002\u5c0e\u4f53\u306e\u96fb\u6c17\u62b5\u6297\u5024R\u306f\u3001R\uff1d\u03c1\uff0aL\/S\uff08\u03c1\uff1a\u96fb\u6c17\u62b5\u6297\u7387\u3001L\uff1a\u5c0e\u4f53\u306e\u9577\u3055\u3001S\uff1a\u5c0e\u4f53\u306e\u65ad\u9762\u7a4d\uff09\u3068\u8868\u3055\u308c\u307e\u3059<a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a>\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u5c0e\u4f53\u3092\u5de6\u53f3\u306b\u5f15\u3063\u5f35\u308b\u3068\u9577\u3055\u306f\u9577\u304f\u3001\u65ad\u9762\u7a4d\u306f\u5c0f\u3055\u304f\u306a\u308b\u305f\u3081\u3001\u96fb\u6c17\u62b5\u6297\u5024\u306f\u5897\u52a0\u3057\u307e\u3059\u3002\u3053\u306e\u539f\u7406\u3092\u5229\u7528\u3057\u3066\u3001\u5727\u529b\u306b\u3088\u308b\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u306e\u5909\u5f62\u3092\u96fb\u6c17\u62b5\u6297\u306e\u5909\u5316\u3068\u3057\u3066\u691c\u51fa\u3057\u307e\u3059<a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>3.2 \u3072\u305a\u307f\u30b2\u30fc\u30b8\u5f0f\u5727\u529b\u30bb\u30f3\u30b5\u306e\u539f\u7406<\/strong><\/h3>\n\n\n\n<p>\u534a\u5c0e\u4f53\u3072\u305a\u307f\u30b2\u30fc\u30b8\u306e\u69cb\u9020\u3067\u306f\u3001\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u306e\u8868\u9762\u306b\u534a\u5c0e\u4f53\u3072\u305a\u307f\u30b2\u30fc\u30b8\u3092\u5f62\u6210\u3057\u3066\u3044\u3066\u3001\u5916\u90e8\u304b\u3089\u306e\u529b\uff08\u5727\u529b\uff09\u306b\u3088\u3063\u3066\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u304c\u5909\u5f62\u3057\u3066\u767a\u751f\u3059\u308b\u30d4\u30a8\u30be\u62b5\u6297\u52b9\u679c\u306b\u3088\u308b\u96fb\u6c17\u62b5\u6297\u306e\u5909\u5316\u3092\u96fb\u6c17\u4fe1\u53f7\u306b\u5909\u63db\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u5727\u529b\u30bb\u30f3\u30b5\u30c1\u30c3\u30d7\u306f\u3001\u4e0d\u7d14\u7269\u62e1\u6563\u306b\u3088\u308a\u30014\u30f6\u6240\u304b\u3064\u540c\u4e00\u65b9\u5411\u306b\u77ed\u518a\u72b6\u306e\u30b2\u30fc\u30b8\u304c\u5f62\u6210\u3055\u308c\u3001\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u52a0\u5de5\u3055\u308c\u305f\u30b7\u30ea\u30b3\u30f3\u304c\u30ac\u30e9\u30b9\u53f0\u5ea7\u306b\u63a5\u5408\u3055\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/hkd.co.jp\/press\/press_tec\/\">5<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>3.3 \u9759\u96fb\u5bb9\u91cf\u5f0f\u5727\u529b\u30bb\u30f3\u30b5\u306e\u539f\u7406<\/strong><\/h3>\n\n\n\n<p>\u9759\u96fb\u5bb9\u91cf\u5f62\u5727\u529b\u30bb\u30f3\u30b5\u306f\u3001\u30ac\u30e9\u30b9\u306e\u56fa\u5b9a\u6975\u3068\u30b7\u30ea\u30b3\u30f3\u306e\u53ef\u52d5\u6975\u3092\u5bfe\u5411\u3055\u305b\u3066\u30b3\u30f3\u30c7\u30f3\u30b5\u3092\u5f62\u6210\u3057\u3001\u5916\u90e8\u304b\u3089\u306e\u529b\uff08\u5727\u529b\uff09\u306b\u3088\u3063\u3066\u53ef\u52d5\u6975\u304c\u5909\u5f62\u3057\u3066\u767a\u751f\u3059\u308b\u9759\u96fb\u5bb9\u91cf\u306e\u5909\u5316\u3092\u96fb\u6c17\u4fe1\u53f7\u306b\u5909\u63db\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a>\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u65b9\u5f0f\u306f\u3001\u5fae\u5c0f\u306a\u5727\u529b\u5909\u5316\u306b\u3082\u9ad8\u3044\u611f\u5ea6\u3092\u6301\u3061\u3001\u5e45\u5e83\u3044\u5727\u529b\u7bc4\u56f2\u3067\u306e\u6e2c\u5b9a\u304c\u53ef\u80fd\u3067\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>3.4 \u5727\u96fb\u7d20\u5b50\u5f0f\u5727\u529b\u30bb\u30f3\u30b5\u306e\u539f\u7406<\/strong><\/h3>\n\n\n\n<p>\u5727\u96fb\u7d20\u5b50\u5f0f\u5727\u529b\u30bb\u30f3\u30b5\u306f\u3001\u6c34\u6676\u306a\u3069\u306e\u5727\u96fb\u4f53\u306b\u5727\u529b\u3092\u304b\u3051\u308b\u3068\u8868\u9762\u306b\u96fb\u8377\u304c\u767a\u751f\u3059\u308b\u7279\u6027\u3092\u5229\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u96fb\u8377\u306e\u5927\u304d\u3055\u306f\u52a0\u3048\u3089\u308c\u305f\u529b\u306b\u6bd4\u4f8b\u3057\u3001\u6975\u6027\u306f\u305d\u306e\u65b9\u5411\u3092\u8868\u3057\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<p>\u5727\u96fb\u52b9\u679c\u306b\u3088\u3063\u3066\u767a\u751f\u3059\u308b\u96fb\u8377\u4fe1\u53f7\u306f\u3001\u30c1\u30e3\u30fc\u30b8\u30a2\u30f3\u30d7\u306b\u3088\u3063\u3066\u96fb\u5727\u4fe1\u53f7\u306b\u5909\u63db\u3055\u308c\u307e\u3059\u3002\u5727\u96fb\u7d20\u5b50\u5f0f\u30bb\u30f3\u30b5\u306f\u3001\u52d5\u7684\u306a\u5727\u529b\u5909\u5316\u306e\u6e2c\u5b9a\u306b\u7279\u306b\u512a\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.kistler.com\/JP\/ja\/%E5%9C%A7%E9%9B%BB%E5%BC%8F%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%EF%BC%9A%E9%9B%BB%E8%8D%B7%E5%87%BA%E5%8A%9B%EF%BC%88pe%EF%BC%89-%E3%81%A8-%E9%9B%BB%E5%9C%A7%E5%87%BA%E5%8A%9B%EF%BC%88iepe%EF%BC%89\/C00000139\">12<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>3.5 \u5149\u5b66\u5f0f\u5727\u529b\u30bb\u30f3\u30b5\u306e\u539f\u7406<\/strong><\/h3>\n\n\n\n<p>\u5149\u5b66\u5f0f\u5727\u529b\u30bb\u30f3\u30b5\u306f\u3001\u5e72\u6e09\u8a08\u3092\u5229\u7528\u3057\u3066\u5149\u30d5\u30a1\u30a4\u30d0\u30fc\u306e\u5727\u529b\u5909\u5316\u3092\u6e2c\u5b9a\u3057\u307e\u3059\u3002\u5727\u529b\u306b\u3088\u3063\u3066\u30d5\u30a1\u30a4\u30d0\u30fc\u5185\u306e\u5149\u306e\u7d4c\u8def\u9577\u3084\u53cd\u5c04\u30fb\u900f\u904e\u7279\u6027\u304c\u5909\u5316\u3059\u308b\u3053\u3068\u3092\u5229\u7528\u3057\u3066\u5727\u529b\u3092\u691c\u77e5\u3057\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u65b9\u5f0f\u306f\u96fb\u78c1\u5e72\u6e09\u3092\u53d7\u3051\u306b\u304f\u304f\u3001\u5371\u967a\u306a\u74b0\u5883\u3084\u7279\u6b8a\u306a\u6761\u4ef6\u4e0b\u3067\u306e\u6e2c\u5b9a\u306b\u9069\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>4. \u5727\u529b\u30bb\u30f3\u30b5\u306e\u69cb\u9020<\/strong><\/h2>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u306e\u57fa\u672c\u69cb\u9020\u306f\u3001\u5727\u529b\u3092\u53d7\u3051\u3066\u5909\u5f62\u3059\u308b\u300c\u53d7\u5727\u90e8\u300d\u3068\u3001\u305d\u306e\u5909\u5f62\u3092\u96fb\u6c17\u4fe1\u53f7\u306b\u5909\u63db\u3059\u308b\u300c\u691c\u51fa\u90e8\u300d\u304b\u3089\u6210\u308a\u7acb\u3063\u3066\u3044\u307e\u3059\u3002\u3053\u3053\u3067\u306f\u3001\u4ee3\u8868\u7684\u306a\u5727\u529b\u30bb\u30f3\u30b5\u306e\u69cb\u9020\u306b\u3064\u3044\u3066\u8aac\u660e\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>4.1 \u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u69cb\u9020<\/strong><\/h3>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u306e\u591a\u304f\u306f\u300c\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u300d\u3068\u547c\u3070\u308c\u308b\u8584\u3044\u819c\u3092\u4f7f\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u306f\u5727\u529b\u3092\u53d7\u3051\u308b\u3068\u5909\u5f62\u3057\u3001\u305d\u306e\u5909\u5f62\u91cf\u304c\u5727\u529b\u306b\u6bd4\u4f8b\u3059\u308b\u3068\u3044\u3046\u7279\u6027\u3092\u6301\u3063\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a>\u3002<\/p>\n\n\n\n<p>\u6750\u6599\u3068\u3057\u3066\u306f\u30b7\u30ea\u30b3\u30f3\u304c\u4e3b\u6d41\u3067\u3059\u304c\u3001\u91d1\u5c5e\u3084\u30bb\u30e9\u30df\u30c3\u30af\u3001\u30dd\u30ea\u30de\u30fc\u306a\u3069\u3082\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u30b7\u30ea\u30b3\u30f3\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u306f\u5fae\u7d30\u52a0\u5de5\u304c\u5bb9\u6613\u3067\u3001\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u3068\u306e\u89aa\u548c\u6027\u304c\u9ad8\u3044\u305f\u3081\u3001\u5e83\u304f\u63a1\u7528\u3055\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.ieice-hbkb.org\/files\/10\/10gun_08hen_02.pdf\">19<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>4.2 \u534a\u5c0e\u4f53\u3072\u305a\u307f\u30b2\u30fc\u30b8\u306e\u69cb\u9020<\/strong><\/h3>\n\n\n\n<p>\u534a\u5c0e\u4f53\u30d4\u30a8\u30be\u62b5\u6297\u62e1\u6563\u5727\u529b\u30bb\u30f3\u30b5\u3067\u306f\u3001\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u306e\u8868\u9762\u306b\u534a\u5c0e\u4f53\u3072\u305a\u307f\u30b2\u30fc\u30b8\u3092\u5f62\u6210\u3057\u3066\u3044\u307e\u3059\u3002\u4e00\u822c\u7684\u306b\u306f\u30014\u304b\u6240\u306b\u30b2\u30fc\u30b8\u3092\u914d\u7f6e\u3057\u3001\u30db\u30a4\u30fc\u30c8\u30b9\u30c8\u30f3\u30d6\u30ea\u30c3\u30b8\u56de\u8def\u3092\u69cb\u6210\u3057\u307e\u3059<a href=\"https:\/\/hkd.co.jp\/press\/press_tec\/\">5<\/a>\u3002<\/p>\n\n\n\n<p>\u3053\u308c\u306b\u3088\u308a\u3001\u6e29\u5ea6\u5909\u5316\u306e\u5f71\u97ff\u3092\u76f8\u6bba\u3057\u3064\u3064\u3001\u5727\u529b\u306b\u3088\u308b\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u306e\u5909\u5f62\u3092\u9ad8\u611f\u5ea6\u306b\u691c\u51fa\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059<a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>4.3 \u9759\u96fb\u5bb9\u91cf\u5f0f\u5727\u529b\u30bb\u30f3\u30b5\u306e\u69cb\u9020<\/strong><\/h3>\n\n\n\n<p>\u9759\u96fb\u5bb9\u91cf\u5f0f\u5727\u529b\u30bb\u30f3\u30b5\u306f\u3001\u56fa\u5b9a\u96fb\u6975\u3068\u53ef\u52d5\u96fb\u6975\uff08\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\uff09\u306e\u9593\u306b\u5f62\u6210\u3055\u308c\u308b\u9759\u96fb\u5bb9\u91cf\u306e\u5909\u5316\u3092\u5229\u7528\u3057\u307e\u3059\u3002\u5727\u529b\u306b\u3088\u3063\u3066\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u304c\u5909\u5f62\u3059\u308b\u3068\u3001\u96fb\u6975\u9593\u306e\u8ddd\u96e2\u304c\u5909\u5316\u3057\u3001\u305d\u308c\u306b\u4f34\u3063\u3066\u9759\u96fb\u5bb9\u91cf\u3082\u5909\u5316\u3057\u307e\u3059<a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a>\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u5909\u5316\u3092\u96fb\u6c17\u56de\u8def\u3067\u691c\u51fa\u3057\u3001\u5727\u529b\u5024\u306b\u5909\u63db\u3057\u307e\u3059\u3002\u9759\u96fb\u5bb9\u91cf\u5f0f\u306f\u9ad8\u611f\u5ea6\u3067\u3042\u308a\u3001\u5fae\u5c0f\u5727\u529b\u306e\u6e2c\u5b9a\u306b\u9069\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>4.4 \u5727\u96fb\u7d20\u5b50\u5f0f\u5727\u529b\u30bb\u30f3\u30b5\u306e\u69cb\u9020<\/strong><\/h3>\n\n\n\n<p>\u5727\u96fb\u7d20\u5b50\u5f0f\u5727\u529b\u30bb\u30f3\u30b5\u306f\u3001\u5727\u96fb\u4f53\uff08\u6c34\u6676\u3084\u30c1\u30bf\u30f3\u9178\u30b8\u30eb\u30b3\u30f3\u9178\u925b\u306a\u3069\uff09\u306b\u76f4\u63a5\u5727\u529b\u3092\u52a0\u3048\u308b\u304b\u3001\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u306a\u3069\u3092\u4ecb\u3057\u3066\u9593\u63a5\u7684\u306b\u5727\u529b\u3092\u52a0\u3048\u308b\u69cb\u9020\u3068\u306a\u3063\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.kistler.com\/JP\/ja\/%E5%9C%A7%E9%9B%BB%E5%BC%8F%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%EF%BC%9A%E9%9B%BB%E8%8D%B7%E5%87%BA%E5%8A%9B%EF%BC%88pe%EF%BC%89-%E3%81%A8-%E9%9B%BB%E5%9C%A7%E5%87%BA%E5%8A%9B%EF%BC%88iepe%EF%BC%89\/C00000139\">12<\/a>\u3002<\/p>\n\n\n\n<p>\u5727\u529b\u306b\u3088\u3063\u3066\u5727\u96fb\u4f53\u306b\u767a\u751f\u3059\u308b\u96fb\u8377\u3092\u691c\u51fa\u3059\u308b\u300c\u96fb\u8377\u51fa\u529b\u578b\uff08PE\uff09\u300d\u3068\u3001\u5185\u8535\u30a2\u30f3\u30d7\u306b\u3088\u3063\u3066\u96fb\u5727\u4fe1\u53f7\u306b\u5909\u63db\u3059\u308b\u300c\u96fb\u5727\u51fa\u529b\u578b\uff08IEPE\uff09\u300d\u306e2\u7a2e\u985e\u304c\u3042\u308a\u307e\u3059<a href=\"https:\/\/www.kistler.com\/JP\/ja\/%E5%9C%A7%E9%9B%BB%E5%BC%8F%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%EF%BC%9A%E9%9B%BB%E8%8D%B7%E5%87%BA%E5%8A%9B%EF%BC%88pe%EF%BC%89-%E3%81%A8-%E9%9B%BB%E5%9C%A7%E5%87%BA%E5%8A%9B%EF%BC%88iepe%EF%BC%89\/C00000139\">12<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>4.5 MEMS\u5727\u529b\u30bb\u30f3\u30b5\u306e\u69cb\u9020<\/strong><\/h3>\n\n\n\n<p>MEMS\u5727\u529b\u30bb\u30f3\u30b5\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30c1\u30c3\u30d7\u4e0a\u306b\u5fae\u7d30\u52a0\u5de5\u6280\u8853\u3092\u7528\u3044\u3066\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u3084\u691c\u51fa\u7d20\u5b50\u3092\u5f62\u6210\u3057\u3066\u3044\u307e\u3059\u3002\u4e00\u822c\u7684\u306b\u306f2\uff5e3mm\u7a0b\u5ea6\u306e\u5c0f\u3055\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u306b\u5b9f\u88c5\u3055\u308c\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<p>MEMS\u30c1\u30c3\u30d7\u306e\u8584\u819c\uff08\u30c0\u30a4\u30e4\u30d5\u30e9\u30e0\uff09\u4e0a\u306b\u3001\u30d4\u30a8\u30be\u62b5\u6297\u304c\u914d\u7f6e\u3055\u308c\u30d6\u30ea\u30c3\u30b8\u56de\u8def\u3092\u5f62\u6210\u3057\u3066\u3044\u308b\u3082\u306e\u304c\u591a\u3044\u3067\u3059\u304c\u3001\u9759\u96fb\u5bb9\u91cf\u5f0f\u306eMEMS\u30bb\u30f3\u30b5\u3082\u5b58\u5728\u3057\u307e\u3059<a href=\"https:\/\/product.minebeamitsumi.com\/tech\/mems\/case_studies\/pressure_sensor.html\">14<\/a>\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>5. \u5727\u529b\u30bb\u30f3\u30b5\u306e\u51fa\u529b<\/strong><\/h2>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u304b\u3089\u306e\u51fa\u529b\u4fe1\u53f7\u306b\u306f\u69d8\u3005\u306a\u5f62\u5f0f\u304c\u3042\u308a\u307e\u3059\u3002\u7528\u9014\u3084\u63a5\u7d9a\u3059\u308b\u6a5f\u5668\u306b\u5fdc\u3058\u3066\u9069\u5207\u306a\u51fa\u529b\u5f62\u5f0f\u306e\u30bb\u30f3\u30b5\u3092\u9078\u629e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>5.1 \u30a2\u30ca\u30ed\u30b0\u51fa\u529b<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>5.1.1 \u96fb\u5727\u51fa\u529b<\/strong><\/h4>\n\n\n\n<p>\u96fb\u5727\u51fa\u529b\u306f\u3001\u5727\u529b\u306b\u6bd4\u4f8b\u3057\u305f\u96fb\u5727\u5024\uff08\u4f8b\uff1a1\uff5e5V DC\u30010\uff5e5V DC\u306a\u3069\uff09\u3092\u51fa\u529b\u3057\u307e\u3059\u3002\u914d\u7dda\u304c\u7c21\u5358\u3067\u3001\u591a\u304f\u306e\u8a08\u6e2c\u6a5f\u5668\u3068\u76f4\u63a5\u63a5\u7d9a\u3067\u304d\u308b\u3068\u3044\u3046\u5229\u70b9\u304c\u3042\u308a\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a><a href=\"https:\/\/www.smcworld.com\/products\/pickup\/ja-jp\/switch_sensor\/output_form.html\">15<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u30010\uff5e100kPa\u306e\u5727\u529b\u7bc4\u56f2\u30671\uff5e5V\u51fa\u529b\u306e\u30bb\u30f3\u30b5\u306e\u5834\u5408\u30010kPa\u30671V\u300150kPa\u30673V\u3001100kPa\u30675V\u306e\u3088\u3046\u306b\u3001\u5727\u529b\u306b\u6bd4\u4f8b\u3057\u305f\u96fb\u5727\u304c\u51fa\u529b\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>5.1.2 \u96fb\u6d41\u51fa\u529b<\/strong><\/h4>\n\n\n\n<p>\u96fb\u6d41\u51fa\u529b\u306f\u3001\u5727\u529b\u306b\u6bd4\u4f8b\u3057\u305f\u96fb\u6d41\u5024\uff08\u4f8b\uff1a4\uff5e20mA DC\uff09\u3092\u51fa\u529b\u3057\u307e\u3059\u3002\u5de5\u696d\u7528\u9014\u3067\u306f\u96fb\u6d41\u51fa\u529b\u304c\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u304a\u308a\u3001\u9577\u8ddd\u96e2\u4f1d\u9001\u306b\u9069\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a><a href=\"https:\/\/www.smcworld.com\/products\/pickup\/ja-jp\/switch_sensor\/output_form.html\">15<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u30010\uff5e100kPa\u306e\u5727\u529b\u7bc4\u56f2\u30674\uff5e20mA\u51fa\u529b\u306e\u30bb\u30f3\u30b5\u306e\u5834\u5408\u30010kPa\u30674mA\u300150kPa\u306712mA\u3001100kPa\u306720mA\u306e\u3088\u3046\u306b\u3001\u5727\u529b\u306b\u6bd4\u4f8b\u3057\u305f\u96fb\u6d41\u304c\u51fa\u529b\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>5.2 \u30c7\u30b8\u30bf\u30eb\u51fa\u529b<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>5.2.1 \u30b7\u30ea\u30a2\u30eb\u901a\u4fe1\u51fa\u529b<\/strong><\/h4>\n\n\n\n<p>SPI\uff08Serial Peripheral Interface\uff09\u3084I\u00b2C\uff08Inter-Integrated Circuit\uff09\u306a\u3069\u306e\u30b7\u30ea\u30a2\u30eb\u901a\u4fe1\u30d7\u30ed\u30c8\u30b3\u30eb\u3092\u4f7f\u7528\u3057\u3066\u3001\u30c7\u30b8\u30bf\u30eb\u4fe1\u53f7\u3067\u5727\u529b\u5024\u3092\u51fa\u529b\u3057\u307e\u3059\u3002\u30de\u30a4\u30b3\u30f3\u3084\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf\u3068\u306e\u63a5\u7d9a\u306b\u9069\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/product.minebeamitsumi.com\/tech\/mems\/case_studies\/pressure_sensor.html\">14<\/a>\u3002<\/p>\n\n\n\n<p>\u30c7\u30b8\u30bf\u30eb\u51fa\u529b\u306e\u5229\u70b9\u306f\u3001\u30a2\u30ca\u30ed\u30b0\u4fe1\u53f7\u306e\u3088\u3046\u306a\u30ce\u30a4\u30ba\u306e\u5f71\u97ff\u3092\u53d7\u3051\u306b\u304f\u304f\u3001\u9ad8\u7cbe\u5ea6\u306a\u5024\u3092\u4f1d\u9001\u3067\u304d\u308b\u3053\u3068\u3067\u3059\u3002\u307e\u305f\u3001\u4e00\u3064\u306e\u901a\u4fe1\u30e9\u30a4\u30f3\u3067\u8907\u6570\u306e\u30bb\u30f3\u30b5\u3092\u63a5\u7d9a\u3067\u304d\u308b\u5834\u5408\u3082\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>5.3 \u30b9\u30a4\u30c3\u30c1\u51fa\u529b<\/strong><\/h3>\n\n\n\n<p>\u8a2d\u5b9a\u3057\u305f\u95be\u5024\uff08\u3057\u304d\u3044\u5024\uff09\u3092\u8d85\u3048\u305f\u3053\u3068\u3092\u691c\u77e5\u3057\u3001\u30b9\u30a4\u30c3\u30c1\u4fe1\u53f7\uff08ON\/OFF\uff09\u3092\u51fa\u529b\u3057\u307e\u3059\u3002\u5727\u529b\u30b9\u30a4\u30c3\u30c1\u3068\u3082\u547c\u3070\u308c\u3001\u7279\u5b9a\u306e\u5727\u529b\u306b\u9054\u3057\u305f\u304b\u3069\u3046\u304b\u3092\u76e3\u8996\u3059\u308b\u306e\u306b\u9069\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.smcworld.com\/products\/pickup\/ja-jp\/switch_sensor\/output_form.html\">15<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u6a5f\u68b0\u306e\u4fdd\u8b77\u306e\u305f\u3081\u306b\u5727\u529b\u304c\u4e00\u5b9a\u5024\u3092\u8d85\u3048\u308b\u3068\u30a2\u30e9\u30fc\u30e0\u3092\u4f5c\u52d5\u3055\u305b\u305f\u308a\u3001\u30dd\u30f3\u30d7\u3092\u505c\u6b62\u3055\u305b\u305f\u308a\u3059\u308b\u3088\u3046\u306a\u7528\u9014\u306b\u4f7f\u308f\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>5.4 \u7279\u6b8a\u306a\u51fa\u529b<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>5.4.1 \u96fb\u8377\u51fa\u529b\uff08PE\u578b\u5727\u96fb\u5f0f\u30bb\u30f3\u30b5\uff09<\/strong><\/h4>\n\n\n\n<p>\u5727\u96fb\u7d20\u5b50\u3092\u4f7f\u7528\u3057\u305f\u30bb\u30f3\u30b5\u306e\u3046\u3061\u3001\u5916\u90e8\u306b\u30c1\u30e3\u30fc\u30b8\u30a2\u30f3\u30d7\u3092\u5fc5\u8981\u3068\u3059\u308b\u30bf\u30a4\u30d7\u306f\u3001\u5727\u529b\u5909\u5316\u306b\u5fdc\u3058\u305f\u96fb\u8377\u4fe1\u53f7\u3092\u51fa\u529b\u3057\u307e\u3059\u3002\u611f\u5ea6\u306f\u5358\u4f4d\u5727\u529b\u3042\u305f\u308a\u306e\u30d4\u30b3\u30af\u30fc\u30ed\u30f3\uff08pC\/bar\u3001pC\/psi\u306a\u3069\uff09\u3067\u8868\u3055\u308c\u307e\u3059<a href=\"https:\/\/www.kistler.com\/JP\/ja\/%E5%9C%A7%E9%9B%BB%E5%BC%8F%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%EF%BC%9A%E9%9B%BB%E8%8D%B7%E5%87%BA%E5%8A%9B%EF%BC%88pe%EF%BC%89-%E3%81%A8-%E9%9B%BB%E5%9C%A7%E5%87%BA%E5%8A%9B%EF%BC%88iepe%EF%BC%89\/C00000139\">12<\/a>\u3002<\/p>\n\n\n\n<p>\u96fb\u8377\u51fa\u529b\u578b\u306f\u3001\u6e96\u9759\u7684\u5727\u529b\u6e2c\u5b9a\u3084\u6975\u7aef\u306a\u6e29\u5ea6\u74b0\u5883\u3067\u306e\u4f7f\u7528\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u304c\u3001\u7279\u6b8a\u306a\u4f4e\u30ce\u30a4\u30ba\u30b1\u30fc\u30d6\u30eb\u3092\u5fc5\u8981\u3068\u3057\u307e\u3059<a href=\"https:\/\/www.kistler.com\/JP\/ja\/%E5%9C%A7%E9%9B%BB%E5%BC%8F%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%EF%BC%9A%E9%9B%BB%E8%8D%B7%E5%87%BA%E5%8A%9B%EF%BC%88pe%EF%BC%89-%E3%81%A8-%E9%9B%BB%E5%9C%A7%E5%87%BA%E5%8A%9B%EF%BC%88iepe%EF%BC%89\/C00000139\">12<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>5.4.2 \u96fb\u5727\u51fa\u529b\uff08IEPE\u578b\u5727\u96fb\u5f0f\u30bb\u30f3\u30b5\uff09<\/strong><\/h4>\n\n\n\n<p>\u5185\u8535\u30a2\u30f3\u30d7\u3092\u6301\u3064\u5727\u96fb\u5f0f\u30bb\u30f3\u30b5\u306f\u3001\u5727\u529b\u5909\u5316\u306b\u5fdc\u3058\u305f\u96fb\u5727\u4fe1\u53f7\u3092\u51fa\u529b\u3057\u307e\u3059\u3002\u611f\u5ea6\u306f\u5358\u4f4d\u5727\u529b\u3042\u305f\u308a\u306e\u30df\u30ea\u30dc\u30eb\u30c8\uff08mV\/bar\u3001mV\/psi\u306a\u3069\uff09\u3067\u8868\u3055\u308c\u307e\u3059<a href=\"https:\/\/www.kistler.com\/JP\/ja\/%E5%9C%A7%E9%9B%BB%E5%BC%8F%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%EF%BC%9A%E9%9B%BB%E8%8D%B7%E5%87%BA%E5%8A%9B%EF%BC%88pe%EF%BC%89-%E3%81%A8-%E9%9B%BB%E5%9C%A7%E5%87%BA%E5%8A%9B%EF%BC%88iepe%EF%BC%89\/C00000139\">12<\/a>\u3002<\/p>\n\n\n\n<p>\u96fb\u5727\u51fa\u529b\u578b\u306f\u6a19\u6e96\u7684\u306a\u30b1\u30fc\u30d6\u30eb\u304c\u4f7f\u7528\u3067\u304d\u3001\u53d6\u308a\u6271\u3044\u304c\u5bb9\u6613\u3067\u3059\u304c\u3001\u6e29\u5ea6\u7bc4\u56f2\u3084\u6e2c\u5b9a\u7bc4\u56f2\u306b\u5236\u9650\u304c\u3042\u308a\u307e\u3059<a href=\"https:\/\/www.kistler.com\/JP\/ja\/%E5%9C%A7%E9%9B%BB%E5%BC%8F%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%EF%BC%9A%E9%9B%BB%E8%8D%B7%E5%87%BA%E5%8A%9B%EF%BC%88pe%EF%BC%89-%E3%81%A8-%E9%9B%BB%E5%9C%A7%E5%87%BA%E5%8A%9B%EF%BC%88iepe%EF%BC%89\/C00000139\">12<\/a>\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>6. \u5727\u529b\u30bb\u30f3\u30b5\u306e\u5229\u7528\u7528\u9014\u30fb\u5229\u7528\u5206\u91ce<\/strong><\/h2>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u306f\u69d8\u3005\u306a\u7523\u696d\u5206\u91ce\u3067\u6d3b\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u4ee5\u4e0b\u3067\u306f\u3001\u4e3b\u306a\u5229\u7528\u5206\u91ce\u3068\u5177\u4f53\u7684\u306a\u7528\u9014\u306b\u3064\u3044\u3066\u8aac\u660e\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>6.1 \u81ea\u52d5\u8eca\u7523\u696d<\/strong><\/h3>\n\n\n\n<p>\u81ea\u52d5\u8eca\u7523\u696d\u3067\u306f\u3001\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u5834\u9762\u3067\u5727\u529b\u30bb\u30f3\u30b5\u304c\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a8\u30f3\u30b8\u30f3\u5236\u5fa1\uff1a\u71c3\u6599\u5727\u529b\u3001\u6392\u6c17\u5727\u529b\u3001\u5438\u6c17\u5727\u529b\u306a\u3069\u306e\u6e2c\u5b9a\u306b\u3088\u308a\u3001\u30a8\u30f3\u30b8\u30f3\u306e\u52b9\u7387\u3084\u6392\u51fa\u30ac\u30b9\u3092\u5236\u5fa1<br><\/li>\n\n\n\n<li>\u30d6\u30ec\u30fc\u30ad\u30b7\u30b9\u30c6\u30e0\uff1a\u6cb9\u5727\u30d6\u30ec\u30fc\u30ad\u306e\u5727\u529b\u76e3\u8996\u3084\u7570\u5e38\u691c\u77e5<br><\/li>\n\n\n\n<li>\u30bf\u30a4\u30e4\u7a7a\u6c17\u5727\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\uff1a\u9069\u6b63\u7a7a\u6c17\u5727\u306e\u7dad\u6301\u306b\u3088\u308b\u71c3\u8cbb\u5411\u4e0a\u3068\u5b89\u5168\u6027\u78ba\u4fdd<br><\/li>\n\n\n\n<li>\u30a8\u30a2\u30d0\u30c3\u30b0\u30b7\u30b9\u30c6\u30e0\uff1a\u885d\u7a81\u6642\u306e\u5727\u529b\u5909\u5316\u3092\u691c\u77e5\u3057\u3066\u30a8\u30a2\u30d0\u30c3\u30b0\u3092\u4f5c\u52d5<br><\/li>\n<\/ul>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u73fe\u4ee3\u306e\u81ea\u52d5\u8eca\u30a8\u30f3\u30b8\u30f3\u3067\u306f\u3001\u30b3\u30e2\u30f3\u30ec\u30fc\u30eb\u5f0f\u71c3\u6599\u5674\u5c04\u88c5\u7f6e\u306e\u9ad8\u5727\u71c3\u6599\u5727\u529b\u3092\u6b63\u78ba\u306b\u6e2c\u5b9a\u3059\u308b\u305f\u3081\u306b\u3001\u9ad8\u7cbe\u5ea6\u306e\u5727\u529b\u30bb\u30f3\u30b5\u304c\u4e0d\u53ef\u6b20\u3068\u306a\u3063\u3066\u3044\u307e\u3059<a href=\"https:\/\/merc.e.u-tokyo.ac.jp\/mmrc\/dp\/pdf\/MMRC87_2006.pdf\">20<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>6.2 \u533b\u7642\u6a5f\u5668<\/strong><\/h3>\n\n\n\n<p>\u533b\u7642\u5206\u91ce\u3067\u306f\u3001\u7cbe\u5ea6\u3001\u4fe1\u983c\u6027\u3001\u5b89\u5b9a\u6027\u3001\u30b5\u30a4\u30ba\u306a\u3069\u3001\u4ed6\u306e\u696d\u754c\u306b\u6bd4\u3079\u3066\u3088\u308a\u9ad8\u3044\u8981\u4ef6\u304c\u5727\u529b\u30bb\u30f3\u30b5\u306b\u8ab2\u305b\u3089\u308c\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8840\u5727\u8a08\uff1a\u30ab\u30d5\u5727\u306e\u6e2c\u5b9a<br><\/li>\n\n\n\n<li>\u4eba\u5de5\u547c\u5438\u5668\uff1a\u60a3\u8005\u3078\u306e\u9069\u5207\u306a\u7a7a\u6c17\u5727\u5236\u5fa1<br><\/li>\n\n\n\n<li>\u70b9\u6ef4\u88c5\u7f6e\uff1a\u9069\u5207\u306a\u6d41\u91cf\u5236\u5fa1<br><\/li>\n\n\n\n<li>\u533b\u7642\u7528\u30ab\u30c6\u30fc\u30c6\u30eb\uff1a\u8840\u7ba1\u5185\u5727\u306e\u6e2c\u5b9a<br><\/li>\n\n\n\n<li>\u900f\u6790\u88c5\u7f6e\uff1a\u900f\u6790\u6db2\u3084\u8840\u6db2\u306e\u5727\u529b\u76e3\u8996<br><\/li>\n<\/ul>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u8840\u5727\u8a08\u3067\u306f\u8155\u3092\u7de0\u3081\u308b\u5727\u529b\u3092\u6e2c\u308a\u306a\u304c\u3089\u3001\u8108\u52d5\u306b\u3088\u308b\u5727\u529b\u5909\u5316\u306e\u6709\u7121\u3092\u691c\u77e5\u3059\u308b\u305f\u3081\u3001\u9ad8\u7cbe\u5ea6\u306e\u5727\u529b\u30bb\u30f3\u30b5\u304c\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.astina.co\/media\/5360\/\">7<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>6.3 \u7523\u696d\u6a5f\u5668<\/strong><\/h3>\n\n\n\n<p>\u7523\u696d\u5206\u91ce\u3067\u306f\u591a\u69d8\u306a\u7528\u9014\u3067\u5727\u529b\u30bb\u30f3\u30b5\u304c\u6d3b\u7528\u3055\u308c\u3066\u3044\u307e\u3059\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7a7a\u8abf\u30fb\u51b7\u51cd\u88c5\u7f6e\uff1a\u51b7\u5a92\u5727\u529b\u306e\u76e3\u8996\u3084\u5236\u5fa1<br><\/li>\n\n\n\n<li>\u6cb9\u5727\u30fb\u7a7a\u5727\u6a5f\u5668\uff1a\u4f5c\u52d5\u6cb9\u3084\u5727\u7e2e\u7a7a\u6c17\u306e\u5727\u529b\u5236\u5fa1<br><\/li>\n\n\n\n<li>\u5de5\u696d\u30d7\u30ed\u30bb\u30b9\uff1a\u5404\u7a2e\u30bf\u30f3\u30af\u3084\u30d1\u30a4\u30d7\u30e9\u30a4\u30f3\u306e\u5727\u529b\u76e3\u8996<br><\/li>\n\n\n\n<li>\u534a\u5c0e\u4f53\u88fd\u9020\uff1a\u30ac\u30b9\u4f9b\u7d66\u30e9\u30a4\u30f3\u3084\u30c1\u30e3\u30f3\u30d0\u30fc\u306e\u5727\u529b\u5236\u5fa1<br><\/li>\n<\/ul>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u3067\u306f\u3001\u5fae\u5c0f\u306a\u5727\u529b\u5909\u5316\u3092\u9ad8\u7cbe\u5ea6\u306b\u5236\u5fa1\u3059\u308b\u305f\u3081\u306b\u3001\u7279\u6b8a\u306a\u5727\u529b\u30bb\u30f3\u30b5\u304c\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/product.minebeamitsumi.com\/tech\/mems\/case_studies\/pressure_sensor.html\">14<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>6.4 \u74b0\u5883\u30fb\u6c17\u8c61\u89b3\u6e2c<\/strong><\/h3>\n\n\n\n<p>\u74b0\u5883\u3084\u6c17\u8c61\u306e\u89b3\u6e2c\u306b\u3082\u5727\u529b\u30bb\u30f3\u30b5\u306f\u6b20\u304b\u305b\u307e\u305b\u3093\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6c17\u8c61\u89b3\u6e2c\uff1a\u5927\u6c17\u5727\u306e\u6e2c\u5b9a\u306b\u3088\u308b\u5929\u5019\u4e88\u6e2c<br><\/li>\n\n\n\n<li>\u9ad8\u5ea6\u8a08\uff1a\u6c17\u5727\u5909\u5316\u304b\u3089\u9ad8\u5ea6\u3092\u7b97\u51fa<br><\/li>\n\n\n\n<li>\u6c34\u4f4d\u8a08\uff1a\u6db2\u4f53\u306e\u5727\u529b\u304b\u3089\u6c34\u4f4d\u3092\u6e2c\u5b9a<br><\/li>\n\n\n\n<li>\u74b0\u5883\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\uff1a\u5927\u6c17\u6c5a\u67d3\u7269\u8cea\u306e\u5727\u529b\u6e2c\u5b9a<br><\/li>\n<\/ul>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u306b\u5185\u8535\u3055\u308c\u305f\u6c17\u5727\u30bb\u30f3\u30b5\u306f\u3001\u9ad8\u5ea6\u8a08\u3068\u3057\u3066\u3082\u6a5f\u80fd\u3057\u3001\u30d5\u30a3\u30c3\u30c8\u30cd\u30b9\u30a2\u30d7\u30ea\u306a\u3069\u3067\u968e\u6bb5\u306e\u4e0a\u308a\u4e0b\u308a\u3092\u691c\u51fa\u3059\u308b\u306e\u306b\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.astina.co\/media\/5360\/\">7<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>6.5 \u98df\u54c1\u30fb\u85ac\u54c1\u7523\u696d<\/strong><\/h3>\n\n\n\n<p>\u98df\u54c1\u3084\u85ac\u54c1\u306e\u88fd\u9020\u904e\u7a0b\u3067\u306f\u3001\u885b\u751f\u7ba1\u7406\u304c\u91cd\u8981\u306a\u305f\u3081\u3001\u7279\u6b8a\u306a\u5727\u529b\u30bb\u30f3\u30b5\u304c\u4f7f\u7528\u3055\u308c\u307e\u3059\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6bba\u83cc\u51e6\u7406\uff1a\u6ec5\u83cc\u30d7\u30ed\u30bb\u30b9\u306e\u5727\u529b\u7ba1\u7406<br><\/li>\n\n\n\n<li>\u767a\u9175\u30bf\u30f3\u30af\uff1a\u767a\u9175\u904e\u7a0b\u306e\u5727\u529b\u76e3\u8996<br><\/li>\n\n\n\n<li>\u5145\u586b\u6a5f\uff1a\u9069\u5207\u306a\u5145\u586b\u5727\u529b\u306e\u5236\u5fa1<br><\/li>\n\n\n\n<li>\u771f\u7a7a\u30d1\u30c3\u30b1\u30fc\u30b8\uff1a\u5305\u88c5\u5185\u306e\u771f\u7a7a\u5ea6\u30c1\u30a7\u30c3\u30af<br><\/li>\n<\/ul>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u30b5\u30cb\u30bf\u30ea\u5727\u529b\u30bb\u30f3\u30b5\u306f\u3001\u98df\u54c1\u30fb\u98f2\u6599\u5411\u3051\u306b\u5c01\u5165\u6db2\u30ec\u30b9\u306e\u30bf\u30a4\u30d7\u304c\u958b\u767a\u3055\u308c\u3066\u304a\u308a\u3001SIP\uff08\u84b8\u6c17\u6bba\u83cc\uff09\u3084CIP\uff08\u5b9a\u7f6e\u6d17\u6d44\uff09\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u3001\u9ad8\u6e29\u4ed5\u69d8\u306b\u306a\u3063\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">9<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>6.6 \u5b89\u5168\u6a5f\u5668\u30fb\u9632\u707d\u8a2d\u5099<\/strong><\/h3>\n\n\n\n<p>\u5b89\u5168\u78ba\u4fdd\u3084\u9632\u707d\u306e\u305f\u3081\u306b\u3082\u5727\u529b\u30bb\u30f3\u30b5\u306f\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6d88\u706b\u8a2d\u5099\uff1a\u6d88\u706b\u5264\u306e\u4f9b\u7d66\u5727\u529b\u76e3\u8996<br><\/li>\n\n\n\n<li>\u30ac\u30b9\u6f0f\u308c\u691c\u77e5\uff1a\u5fae\u5c0f\u306a\u5727\u529b\u5909\u5316\u306e\u691c\u51fa<br><\/li>\n\n\n\n<li>\u69cb\u9020\u7269\u306e\u8377\u91cd\u76e3\u8996\uff1a\u5efa\u7269\u3084\u6a4b\u306e\u5727\u529b\u5206\u5e03\u6e2c\u5b9a<br><\/li>\n\n\n\n<li>\u30bb\u30ad\u30e5\u30ea\u30c6\u30a3\u30b7\u30b9\u30c6\u30e0\uff1a\u5727\u529b\u5909\u5316\u306b\u3088\u308b\u4fb5\u5165\u691c\u77e5<br><\/li>\n<\/ul>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u30ac\u30b9\u30e1\u30fc\u30bf\u30fc\u3067\u306f\u6f0f\u308c\u691c\u77e5\u3084\u7570\u5e38\u5727\u691c\u77e5\u306e\u305f\u3081\u306b\u9ad8\u611f\u5ea6\u306e\u5727\u529b\u30bb\u30f3\u30b5\u304c\u63a1\u7528\u3055\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/product.minebeamitsumi.com\/tech\/mems\/case_studies\/pressure_sensor.html\">14<\/a>\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>7. \u5727\u529b\u30bb\u30f3\u30b5\u306e\u4ed5\u69d8\u30fb\u6027\u80fd<\/strong><\/h2>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u3092\u9078\u5b9a\u3059\u308b\u969b\u306b\u306f\u3001\u69d8\u3005\u306a\u4ed5\u69d8\u3084\u6027\u80fd\u6307\u6a19\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002\u3053\u3053\u3067\u306f\u4e3b\u8981\u306a\u6027\u80fd\u30d1\u30e9\u30e1\u30fc\u30bf\u306b\u3064\u3044\u3066\u8aac\u660e\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.1 \u6e2c\u5b9a\u7bc4\u56f2<\/strong><\/h3>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u304c\u6e2c\u5b9a\u3067\u304d\u308b\u5727\u529b\u306e\u6700\u5c0f\u5024\u3068\u6700\u5927\u5024\u3092\u793a\u3057\u307e\u3059\u3002\u4f8b\u3048\u3070\u3001\u300c0\uff5e100kPa\u300d\u3001\u300c-100\uff5e100kPa\u300d\u306a\u3069\u3068\u8868\u8a18\u3055\u308c\u307e\u3059\u3002\u6e2c\u5b9a\u5bfe\u8c61\u306e\u5727\u529b\u7bc4\u56f2\u306b\u9069\u3057\u305f\u30bb\u30f3\u30b5\u3092\u9078\u3076\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<p>\u6a2a\u6cb3\u96fb\u6a5f\u306e\u5c0f\u5f62\u5727\u529b\u30bb\u30f3\u30b5\u306e\u4f8b\u3067\u306f\u3001\u6e2c\u5b9a\u7bc4\u56f2\u306f-10k\uff5e10kPa\u306e\u5fae\u5727\u304b\u30890\uff5e35MPa\u306e\u9ad8\u5727\u307e\u3067\u591a\u5c90\u306b\u308f\u305f\u308a\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002\u9069\u5207\u306a\u6e2c\u5b9a\u7bc4\u56f2\u306e\u30bb\u30f3\u30b5\u3092\u9078\u3070\u306a\u3044\u3068\u3001\u6e2c\u5b9a\u8aa4\u5dee\u304c\u5927\u304d\u304f\u306a\u3063\u305f\u308a\u3001\u30bb\u30f3\u30b5\u304c\u7834\u640d\u3057\u305f\u308a\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.2 \u7cbe\u5ea6<\/strong><\/h3>\n\n\n\n<p>\u30bb\u30f3\u30b5\u306e\u6e2c\u5b9a\u5024\u304c\u5b9f\u969b\u306e\u5727\u529b\u5024\u306b\u3069\u308c\u3060\u3051\u8fd1\u3044\u304b\u3092\u793a\u3059\u6307\u6a19\u3067\u3059\u3002\u901a\u5e38\u306f\u300c\u30d5\u30eb\u30b9\u30b1\u30fc\u30eb\u306b\u5bfe\u3059\u308b\u8aa4\u5dee\u306e\u5272\u5408\uff08% of F.S.\uff09\u300d\u3068\u3057\u3066\u8868\u3055\u308c\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u300c\u00b10.25% of F.S.\u300d\u3068\u3044\u3046\u7cbe\u5ea6\u306e\u30bb\u30f3\u30b5\u3067\u3001\u6e2c\u5b9a\u7bc4\u56f2\u304c0\uff5e100kPa\u306e\u5834\u5408\u3001\u8aa4\u5dee\u306f\u6700\u5927\u3067\u00b10.25kPa\u3068\u306a\u308a\u307e\u3059\u3002\u9ad8\u7cbe\u5ea6\u304c\u8981\u6c42\u3055\u308c\u308b\u7528\u9014\u3067\u306f\u00b10.1%\u4ee5\u4e0b\u306e\u7cbe\u5ea6\u3092\u6301\u3064\u30bb\u30f3\u30b5\u304c\u4f7f\u7528\u3055\u308c\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.3 \u5206\u89e3\u80fd<\/strong><\/h3>\n\n\n\n<p>\u30bb\u30f3\u30b5\u304c\u691c\u51fa\u3067\u304d\u308b\u6700\u5c0f\u306e\u5727\u529b\u5909\u5316\u3092\u793a\u3057\u307e\u3059\u3002\u4f8b\u3048\u3070\u3001\u300c3.3Pa\uff080.025mmHg\uff09\u300d\u306e\u3088\u3046\u306b\u8868\u8a18\u3055\u308c\u307e\u3059<a href=\"https:\/\/product.minebeamitsumi.com\/tech\/mems\/case_studies\/pressure_sensor.html\">14<\/a>\u3002<\/p>\n\n\n\n<p>\u9ad8\u3044\u5206\u89e3\u80fd\u306f\u5fae\u5c0f\u306a\u5727\u529b\u5909\u5316\u306e\u691c\u51fa\u306b\u91cd\u8981\u3067\u3059\u3002\u4f8b\u3048\u3070\u3001\u5fae\u5727\u30bb\u30f3\u30b5\u3067\u306f\u5f93\u6765\u306e\u5727\u529b\u30bb\u30f3\u30b5\u306e\u5727\u529b\u6e2c\u5b9a\u8aa4\u5dee\u304c\u00b1266Pa\u306b\u5bfe\u3057\u3001\u00b140Pa\u3068\u3088\u308a\u9ad8\u3044\u7cbe\u5ea6\u3067\u306e\u6e2c\u5b9a\u304c\u53ef\u80fd\u306b\u306a\u3063\u3066\u3044\u307e\u3059<a href=\"https:\/\/product.minebeamitsumi.com\/tech\/mems\/case_studies\/pressure_sensor.html\">14<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.4 \u6e29\u5ea6\u7279\u6027<\/strong><\/h3>\n\n\n\n<p>\u6e29\u5ea6\u5909\u5316\u306b\u3088\u308b\u30bb\u30f3\u30b5\u51fa\u529b\u3078\u306e\u5f71\u97ff\u3092\u793a\u3057\u307e\u3059\u3002\u4e3b\u306b\u300c\u30bc\u30ed\u70b9\u306e\u6e29\u5ea6\u4fc2\u6570\u300d\u3068\u300c\u30b9\u30d1\u30f3\u306e\u6e29\u5ea6\u4fc2\u6570\u300d\u304c\u3042\u308a\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u300c\u6e29\u5ea6\u7279\u6027\uff08\u30bc\u30ed\u70b9\uff09\u00b10.03% of span\/\u00b0C\u300d\u3068\u3044\u3046\u4ed5\u69d8\u306f\u30011\u00b0C\u306e\u6e29\u5ea6\u5909\u5316\u306b\u5bfe\u3057\u3066\u51fa\u529b\u306e\u30bc\u30ed\u70b9\u304c\u6e2c\u5b9a\u30b9\u30d1\u30f3\u306e\u00b10.03%\u5909\u52d5\u3059\u308b\u3053\u3068\u3092\u610f\u5473\u3057\u307e\u3059\u3002\u6e29\u5ea6\u5909\u5316\u306e\u5927\u304d\u3044\u74b0\u5883\u3067\u306f\u3053\u306e\u7279\u6027\u304c\u91cd\u8981\u3068\u306a\u308a\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.5 \u5fdc\u7b54\u901f\u5ea6<\/strong><\/h3>\n\n\n\n<p>\u5727\u529b\u5909\u5316\u306b\u5bfe\u3057\u3066\u30bb\u30f3\u30b5\u304c\u5fdc\u7b54\u3059\u308b\u901f\u3055\u3092\u793a\u3057\u307e\u3059\u3002\u4e00\u822c\u7684\u306b\u306f\u3001\u30b9\u30c6\u30c3\u30d7\u72b6\u306e\u5727\u529b\u5909\u5316\u306b\u5bfe\u3057\u3066\u51fa\u529b\u304c\u6700\u7d42\u5024\u306e63%\u306b\u9054\u3059\u308b\u307e\u3067\u306e\u6642\u9593\uff08\u6642\u5b9a\u6570\uff09\u3067\u8868\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5fdc\u7b54\u901f\u5ea6\u304c\u91cd\u8981\u3068\u306a\u308b\u306e\u306f\u3001\u30a8\u30a2\u30d0\u30c3\u30b0\u30b7\u30b9\u30c6\u30e0\u3084\u7206\u767a\u5727\u306a\u3069\u306e\u77ac\u9593\u7684\u306a\u5727\u529b\u5909\u5316\u3092\u6e2c\u5b9a\u3059\u308b\u5834\u5408\u3067\u3059\u3002\u5727\u96fb\u7d20\u5b50\u65b9\u5f0f\u306e\u30bb\u30f3\u30b5\u306f\u7279\u306b\u9ad8\u901f\u5fdc\u7b54\u6027\u306b\u512a\u308c\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.kistler.com\/JP\/ja\/%E5%9C%A7%E9%9B%BB%E5%BC%8F%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%EF%BC%9A%E9%9B%BB%E8%8D%B7%E5%87%BA%E5%8A%9B%EF%BC%88pe%EF%BC%89-%E3%81%A8-%E9%9B%BB%E5%9C%A7%E5%87%BA%E5%8A%9B%EF%BC%88iepe%EF%BC%89\/C00000139\">12<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.6 \u8a31\u5bb9\u904e\u5927\u5727<\/strong><\/h3>\n\n\n\n<p>\u30bb\u30f3\u30b5\u304c\u7834\u640d\u305b\u305a\u306b\u8010\u3048\u3089\u308c\u308b\u6700\u5927\u306e\u5727\u529b\u3092\u793a\u3057\u307e\u3059\u3002\u6e2c\u5b9a\u7bc4\u56f2\u306e\u4e0a\u9650\u3092\u8d85\u3048\u308b\u5727\u529b\u304c\u4e00\u6642\u7684\u306b\u304b\u304b\u3063\u3066\u3082\u3001\u30bb\u30f3\u30b5\u304c\u7834\u640d\u3057\u306a\u3044\u4f59\u88d5\u5ea6\u3092\u8868\u3057\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u6e2c\u5b9a\u7bc4\u56f20\uff5e200kPa\u306e\u30bb\u30f3\u30b5\u3067\u3001\u8a31\u5bb9\u904e\u5927\u5727\u304c800kPa\u306e\u5834\u5408\u3001\u4e00\u6642\u7684\u306b800kPa\u307e\u3067\u306e\u5727\u529b\u304c\u304b\u304b\u3063\u3066\u3082\u7834\u640d\u3057\u306a\u3044\u3053\u3068\u3092\u610f\u5473\u3057\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.7 \u8010\u74b0\u5883\u6027\u80fd<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>7.7.1 \u52d5\u4f5c\u6e29\u5ea6\u7bc4\u56f2<\/strong><\/h4>\n\n\n\n<p>\u30bb\u30f3\u30b5\u304c\u6b63\u5e38\u306b\u52d5\u4f5c\u3059\u308b\u6e29\u5ea6\u306e\u7bc4\u56f2\u3092\u793a\u3057\u307e\u3059\u3002\u4f8b\u3048\u3070\u300c-25\uff5e75\u00b0C\u300d\u306e\u3088\u3046\u306b\u8868\u8a18\u3055\u308c\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>7.7.2 \u9632\u6c34\u30fb\u9632\u5875\u6027\u80fd<\/strong><\/h4>\n\n\n\n<p>IP\u30b3\u30fc\u30c9\uff08International Protection Code\uff09\u3067\u8868\u3055\u308c\u308b\u9632\u6c34\u30fb\u9632\u5875\u6027\u80fd\u3002\u4f8b\u3048\u3070\u300cIP67\u300d\u306f\u9632\u5875\u6027\u3068\u4e00\u6642\u7684\u306a\u6c34\u6ca1\u306b\u8010\u3048\u308b\u80fd\u529b\u3092\u793a\u3057\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>7.7.3 \u8010\u85ac\u54c1\u6027<\/strong><\/h4>\n\n\n\n<p>\u6e2c\u5b9a\u5bfe\u8c61\u306e\u6d41\u4f53\u306b\u542b\u307e\u308c\u308b\u5316\u5b66\u7269\u8cea\u306b\u5bfe\u3059\u308b\u8010\u6027\u3092\u793a\u3057\u307e\u3059\u3002\u7279\u306b\u8150\u98df\u6027\u306e\u3042\u308b\u6d41\u4f53\u3092\u6e2c\u5b9a\u3059\u308b\u5834\u5408\u306b\u91cd\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>8. \u5727\u529b\u30bb\u30f3\u30b5\u306e\u9078\u5b9a\u65b9\u6cd5<\/strong><\/h2>\n\n\n\n<p>\u9069\u5207\u306a\u5727\u529b\u30bb\u30f3\u30b5\u3092\u9078\u5b9a\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u8981\u7d20\u3092\u8003\u616e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>8.1 \u5727\u529b\u306e\u7a2e\u985e\u3068\u30ec\u30f3\u30b8<\/strong><\/h3>\n\n\n\n<p>\u307e\u305a\u3001\u6e2c\u5b9a\u3057\u305f\u3044\u5727\u529b\u306e\u7a2e\u985e\uff08\u30b2\u30fc\u30b8\u5727\u3001\u7d76\u5bfe\u5727\u3001\u5dee\u5727\uff09\u3068\u6e2c\u5b9a\u7bc4\u56f2\u3092\u78ba\u8a8d\u3057\u307e\u3059\u3002\u6e2c\u5b9a\u7bc4\u56f2\u306f\u5b9f\u969b\u306b\u6e2c\u5b9a\u3057\u305f\u3044\u7bc4\u56f2\u306e1.5\uff5e2\u500d\u7a0b\u5ea6\u306e\u4f59\u88d5\u3092\u6301\u305f\u305b\u308b\u306e\u304c\u4e00\u822c\u7684\u3067\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">9<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u901a\u5e380\uff5e50kPa\u306e\u7bc4\u56f2\u3067\u4f7f\u7528\u3059\u308b\u5834\u5408\u30010\uff5e100kPa\u304f\u3089\u3044\u306e\u6e2c\u5b9a\u7bc4\u56f2\u3092\u6301\u3064\u30bb\u30f3\u30b5\u3092\u9078\u3076\u3068\u3001\u4e00\u6642\u7684\u306a\u5727\u529b\u4e0a\u6607\u306b\u3082\u5bfe\u5fdc\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>8.2 \u6e2c\u5b9a\u5bfe\u8c61\u306e\u7a2e\u985e<\/strong><\/h3>\n\n\n\n<p>\u6e2c\u5b9a\u5bfe\u8c61\u304c\u6c17\u4f53\u304b\u6db2\u4f53\u304b\u3001\u307e\u305f\u8150\u98df\u6027\u3084\u7206\u767a\u6027\u306e\u6709\u7121\u306b\u3088\u3063\u3066\u30bb\u30f3\u30b5\u306e\u6750\u8cea\u3084\u69cb\u9020\u3092\u9078\u5b9a\u3057\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">9<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u8150\u98df\u6027\u306e\u5f37\u3044\u6db2\u4f53\u3092\u6e2c\u5b9a\u3059\u308b\u5834\u5408\u306f\u3001\u63a5\u6db2\u90e8\u306b\u30cf\u30b9\u30c6\u30ed\u30a4\u306a\u3069\u306e\u8010\u98df\u6027\u6750\u6599\u3092\u4f7f\u7528\u3057\u305f\u30bb\u30f3\u30b5\u304c\u5fc5\u8981\u3067\u3059\u3002\u98df\u54c1\u3084\u533b\u85ac\u54c1\u3092\u6271\u3046\u5834\u5408\u306f\u3001\u30b5\u30cb\u30bf\u30ea\u4ed5\u69d8\u306e\u30bb\u30f3\u30b5\u304c\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>8.3 \u51fa\u529b\u4fe1\u53f7\u306e\u7a2e\u985e<\/strong><\/h3>\n\n\n\n<p>\u63a5\u7d9a\u3059\u308b\u6a5f\u5668\u3084\u30b7\u30b9\u30c6\u30e0\u306b\u5408\u308f\u305b\u3066\u3001\u9069\u5207\u306a\u51fa\u529b\u4fe1\u53f7\uff084-20mA\u30011-5V\u3001\u30c7\u30b8\u30bf\u30eb\u4fe1\u53f7\u306a\u3069\uff09\u3092\u9078\u3073\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">9<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u9577\u8ddd\u96e2\u4f1d\u9001\u304c\u5fc5\u8981\u306a\u5de5\u5834\u5185\u3067\u306f4-20mA\u306e\u96fb\u6d41\u51fa\u529b\u304c\u9069\u3057\u3066\u304a\u308a\u3001\u30de\u30a4\u30b3\u30f3\u3068\u76f4\u63a5\u63a5\u7d9a\u3059\u308b\u5834\u5408\u306fSPI\u3084I\u00b2C\u306a\u3069\u306e\u30c7\u30b8\u30bf\u30eb\u51fa\u529b\u304c\u4fbf\u5229\u3067\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>8.4 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class=\"wp-block-heading\"><strong>9. \u5727\u529b\u30bb\u30f3\u30b5\u306e\u4f7f\u3044\u65b9<\/strong><\/h2>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u3092\u6b63\u3057\u304f\u4f7f\u7528\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u9069\u5207\u306a\u53d6\u308a\u4ed8\u3051\u3001\u914d\u7dda\u3001\u8a2d\u5b9a\u304c\u5fc5\u8981\u3067\u3059\u3002\u3053\u3053\u3067\u306f\u3001\u5727\u529b\u30bb\u30f3\u30b5\u306e\u57fa\u672c\u7684\u306a\u4f7f\u3044\u65b9\u306b\u3064\u3044\u3066\u8aac\u660e\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>9.1 \u53d6\u308a\u4ed8\u3051\u65b9\u6cd5<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>9.1.1 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class=\"wp-block-list\">\n<li>\u96fb\u5727\u51fa\u529b\uff081-5V\u30010-5V\u7b49\uff09\uff1a\u9ad8\u5165\u529b\u30a4\u30f3\u30d4\u30fc\u30c0\u30f3\u30b9\u306e\u8a08\u6e2c\u6a5f\u5668\u306b\u63a5\u7d9a<br><\/li>\n\n\n\n<li>\u96fb\u6d41\u51fa\u529b\uff084-20mA\uff09\uff1a\u9069\u5207\u306a\u8ca0\u8377\u62b5\u6297\uff08\u901a\u5e38250\u03a9\uff5e500\u03a9\uff09\u3092\u63a5\u7d9a<br><\/li>\n\n\n\n<li>\u30c7\u30b8\u30bf\u30eb\u51fa\u529b\uff08SPI\u3001I\u00b2C\u7b49\uff09\uff1a\u9069\u5207\u306a\u901a\u4fe1\u30d7\u30ed\u30c8\u30b3\u30eb\u3067\u63a5\u7d9a<br><\/li>\n<\/ul>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>9.2.3 \u30ce\u30a4\u30ba\u5bfe\u7b56<\/strong><\/h4>\n\n\n\n<p>\u5de5\u5834\u306a\u3069\u96fb\u6c17\u7684\u30ce\u30a4\u30ba\u306e\u591a\u3044\u74b0\u5883\u3067\u306f\u3001\u30b7\u30fc\u30eb\u30c9\u7dda\u306e\u4f7f\u7528\u3084\u9069\u5207\u306a\u63a5\u5730\u3092\u884c\u3046\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002\u7279\u306b\u9577\u8ddd\u96e2\u914d\u7dda\u306e\u5834\u5408\u3001\u30ce\u30a4\u30ba\u306e\u5f71\u97ff\u3092\u53d7\u3051\u3084\u3059\u3044\u306e\u3067\u6ce8\u610f\u304c\u5fc5\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u96fb\u5727\u51fa\u529b\u3088\u308a\u3082\u96fb\u6d41\u51fa\u529b\u306e\u65b9\u304c\u30ce\u30a4\u30ba\u306e\u5f71\u97ff\u3092\u53d7\u3051\u306b\u304f\u3044\u3068\u3044\u3046\u7279\u5fb4\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>9.3 \u6821\u6b63\u3068\u8abf\u6574<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>9.3.1 \u521d\u671f\u6821\u6b63<\/strong><\/h4>\n\n\n\n<p>\u591a\u304f\u306e\u5727\u529b\u30bb\u30f3\u30b5\u306f\u51fa\u8377\u6642\u306b\u6821\u6b63\u3055\u308c\u3066\u3044\u307e\u3059\u304c\u3001\u9577\u671f\u9593\u4f7f\u7528\u3059\u308b\u5834\u5408\u3084\u9ad8\u7cbe\u5ea6\u304c\u8981\u6c42\u3055\u308c\u308b\u7528\u9014\u3067\u306f\u3001\u5b9a\u671f\u7684\u306a\u6821\u6b63\u304c\u5fc5\u8981\u3067\u3059\u3002\u6821\u6b63\u306b\u306f\u6a19\u6e96\u5727\u529b\u6e90\u3068\u6bd4\u8f03\u3059\u308b\u65b9\u6cd5\u304c\u4e00\u822c\u7684\u3067\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>9.3.2 \u30bc\u30ed\u70b9\u8abf\u6574<\/strong><\/h4>\n\n\n\n<p>\u591a\u304f\u306e\u30bb\u30f3\u30b5\u306b\u306f\u30bc\u30ed\u70b9\u8abf\u6574\u6a5f\u80fd\u304c\u3042\u308a\u3001\u5727\u529b\u3092\u304b\u3051\u306a\u3044\u72b6\u614b\u3067\u51fa\u529b\u3092\u8abf\u6574\u3067\u304d\u307e\u3059\u3002\u4f8b\u3048\u3070\u3001\u30b2\u30fc\u30b8\u5727\u30bb\u30f3\u30b5\u306e\u5834\u5408\u3001\u5927\u6c17\u958b\u653e\u72b6\u614b\u3067\u51fa\u529b\u304c4mA\u30841V\u306b\u306a\u308b\u3088\u3046\u306b\u8abf\u6574\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>9.3.3 \u30b9\u30d1\u30f3\u8abf\u6574<\/strong><\/h4>\n\n\n\n<p>\u30b9\u30d1\u30f3\u8abf\u6574\u306f\u3001\u30bb\u30f3\u30b5\u306e\u611f\u5ea6\u3092\u8abf\u6574\u3059\u308b\u3082\u306e\u3067\u3001\u5b9a\u683c\u5727\u529b\u3092\u304b\u3051\u305f\u3068\u304d\u306b\u51fa\u529b\u304c\u6b63\u3057\u3044\u5024\uff08\u4f8b\uff1a20mA\u30845V\uff09\u306b\u306a\u308b\u3088\u3046\u306b\u8abf\u6574\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>9.4 \u30c7\u30fc\u30bf\u51e6\u7406<\/strong><\/h2>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>9.4.1 \u4fe1\u53f7\u5909\u63db<\/strong><\/h4>\n\n\n\n<p>\u30bb\u30f3\u30b5\u304b\u3089\u306e\u51fa\u529b\u4fe1\u53f7\u3092\u5b9f\u969b\u306e\u5727\u529b\u5024\u306b\u5909\u63db\u3059\u308b\u306b\u306f\u3001\u5909\u63db\u5f0f\u3092\u4f7f\u7528\u3057\u307e\u3059\u3002<br>\u4f8b\u3048\u3070\u30014-20mA\u51fa\u529b\u306e0-100kPa\u30bb\u30f3\u30b5\u306e\u5834\u5408\uff1a<br>\u5727\u529b[kPa] = (\u6e2c\u5b9a\u96fb\u6d41[mA] - 4) \u00d7 100 \u00f7 16<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>9.4.2 \u30d5\u30a3\u30eb\u30bf\u30ea\u30f3\u30b0<\/strong><\/h4>\n\n\n\n<p>\u5727\u529b\u4fe1\u53f7\u306b\u30ce\u30a4\u30ba\u3084\u4e00\u6642\u7684\u306a\u5909\u52d5\u304c\u3042\u308b\u5834\u5408\u3001\u79fb\u52d5\u5e73\u5747\u3084\u4f4e\u57df\u901a\u904e\u30d5\u30a3\u30eb\u30bf\u306a\u3069\u306e\u624b\u6cd5\u3067\u30c7\u30fc\u30bf\u3092\u5e73\u6ed1\u5316\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>9.4.3 \u7570\u5e38\u5024\u306e\u691c\u51fa<\/strong><\/h4>\n\n\n\n<p>\u30bb\u30f3\u30b5\u306e\u6545\u969c\u3084\u914d\u7ba1\u306e\u7570\u5e38\u3092\u65e9\u671f\u306b\u767a\u898b\u3059\u308b\u305f\u3081\u3001\u51fa\u529b\u5024\u306e\u76e3\u8996\u3068\u7570\u5e38\u5024\u306e\u691c\u51fa\u3092\u884c\u3046\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002\u4f8b\u3048\u3070\u3001\u6025\u6fc0\u306a\u5727\u529b\u5909\u5316\u3084\u7bc4\u56f2\u5916\u306e\u5024\u304c\u691c\u51fa\u3055\u308c\u305f\u5834\u5408\u306b\u30a2\u30e9\u30fc\u30e0\u3092\u767a\u3059\u308b\u4ed5\u7d44\u307f\u3092\u8a2d\u3051\u307e\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>10. \u5727\u529b\u30bb\u30f3\u30b5\u4f7f\u7528\u4e0a\u306e\u6ce8\u610f\u70b9<\/strong><\/h2>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u3092\u9577\u671f\u9593\u5b89\u5b9a\u3057\u3066\u4f7f\u7528\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u6ce8\u610f\u70b9\u306b\u7559\u610f\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>10.1 \u904e\u8ca0\u8377\u306e\u9632\u6b62<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.1.1 \u8a31\u5bb9\u904e\u5927\u5727\u306e\u9075\u5b88<\/strong><\/h4>\n\n\n\n<p>\u30bb\u30f3\u30b5\u306e\u8a31\u5bb9\u904e\u5927\u5727\u3092\u8d85\u3048\u308b\u5727\u529b\u3092\u304b\u3051\u306a\u3044\u3088\u3046\u6ce8\u610f\u304c\u5fc5\u8981\u3067\u3059\u3002\u904e\u5927\u306a\u5727\u529b\u306f\u30bb\u30f3\u30b5\u306e\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u3092\u5909\u5f62\u3055\u305b\u3001\u7279\u6027\u306e\u5909\u5316\u3084\u6545\u969c\u306e\u539f\u56e0\u3068\u306a\u308a\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u30a6\u30a9\u30fc\u30bf\u30fc\u30cf\u30f3\u30de\u30fc\uff08\u6c34\u6483\u4f5c\u7528\uff09\u306e\u3088\u3046\u306a\u6025\u6fc0\u306a\u5727\u529b\u4e0a\u6607\u304c\u767a\u751f\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u5834\u5408\u306f\u3001\u30b9\u30ca\u30d0\uff08\u5727\u529b\u7de9\u885d\u88c5\u7f6e\uff09\u3092\u8a2d\u7f6e\u3059\u308b\u306a\u3069\u306e\u5bfe\u7b56\u304c\u5fc5\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.1.2 \u5727\u529b\u5909\u52d5\u3078\u306e\u5bfe\u5fdc<\/strong><\/h4>\n\n\n\n<p>\u6025\u6fc0\u306a\u5727\u529b\u5909\u52d5\u304c\u3042\u308b\u5834\u5408\u306f\u3001\u30aa\u30ea\u30d5\u30a3\u30b9\u3084\u30b9\u30ca\u30d0\u30fc\u306a\u3069\u3092\u4f7f\u3063\u3066\u5909\u52d5\u3092\u7de9\u548c\u3059\u308b\u3053\u3068\u304c\u52b9\u679c\u7684\u3067\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>10.2 \u74b0\u5883\u6761\u4ef6\u3078\u306e\u914d\u616e<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.2.1 \u6e29\u5ea6\u306e\u5f71\u97ff<\/strong><\/h4>\n\n\n\n<p>\u591a\u304f\u306e\u5727\u529b\u30bb\u30f3\u30b5\u306f\u6e29\u5ea6\u306b\u3088\u3063\u3066\u7279\u6027\u304c\u5909\u5316\u3057\u307e\u3059\u3002\u52d5\u4f5c\u6e29\u5ea6\u7bc4\u56f2\u5185\u3067\u4f7f\u7528\u3059\u308b\u3053\u3068\u306f\u3082\u3061\u308d\u3093\u3001\u6025\u6fc0\u306a\u6e29\u5ea6\u5909\u5316\u3082\u907f\u3051\u308b\u3079\u304d\u3067\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">8<\/a>\u3002<\/p>\n\n\n\n<p>\u6e29\u5ea6\u306b\u3088\u308b\u8aa4\u5dee\u304c\u554f\u984c\u3068\u306a\u308b\u5834\u5408\u306f\u3001\u6e29\u5ea6\u88dc\u511f\u6a5f\u80fd\u3092\u6301\u3064\u30bb\u30f3\u30b5\u3092\u9078\u629e\u3059\u308b\u304b\u3001\u5916\u90e8\u3067\u6e29\u5ea6\u88dc\u511f\u3092\u884c\u3046\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.2.2 \u632f\u52d5\u30fb\u885d\u6483\u306e\u5f71\u97ff<\/strong><\/h4>\n\n\n\n<p>\u5f37\u3044\u632f\u52d5\u3084\u885d\u6483\u306f\u30bb\u30f3\u30b5\u306e\u7279\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u305f\u308a\u3001\u5185\u90e8\u69cb\u9020\u3092\u640d\u50b7\u3055\u305b\u305f\u308a\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u7279\u306b\u5727\u96fb\u7d20\u5b50\u65b9\u5f0f\u306e\u30bb\u30f3\u30b5\u306f\u632f\u52d5\u306b\u654f\u611f\u3067\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a>\u3002<\/p>\n\n\n\n<p>\u632f\u52d5\u306e\u591a\u3044\u74b0\u5883\u3067\u306f\u3001\u30bb\u30f3\u30b5\u3092\u67d4\u8edf\u306b\u56fa\u5b9a\u3057\u305f\u308a\u3001\u632f\u52d5\u5438\u53ce\u6750\u3092\u4f7f\u7528\u3057\u305f\u308a\u3059\u308b\u306a\u3069\u306e\u5bfe\u7b56\u304c\u5fc5\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.2.3 \u96fb\u78c1\u30ce\u30a4\u30ba\u306e\u5f71\u97ff<\/strong><\/h4>\n\n\n\n<p>\u5f37\u3044\u96fb\u78c1\u30ce\u30a4\u30ba\u304c\u3042\u308b\u74b0\u5883\u3067\u306f\u3001\u30b7\u30fc\u30eb\u30c9\u30b1\u30fc\u30d6\u30eb\u306e\u4f7f\u7528\u3084\u9069\u5207\u306a\u63a5\u5730\u3001\u30d5\u30a3\u30eb\u30bf\u306e\u8a2d\u7f6e\u306a\u3069\u304c\u91cd\u8981\u3067\u3059\u3002\u7279\u306b\u96fb\u5727\u51fa\u529b\u30bf\u30a4\u30d7\u306e\u30bb\u30f3\u30b5\u306f\u30ce\u30a4\u30ba\u306e\u5f71\u97ff\u3092\u53d7\u3051\u3084\u3059\u3044\u3067\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>10.3 \u6e2c\u5b9a\u5bfe\u8c61\u7269\u3078\u306e\u914d\u616e<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.3.1 \u8150\u98df\u6027\u7269\u8cea\u3078\u306e\u5bfe\u5fdc<\/strong><\/h4>\n\n\n\n<p>\u6e2c\u5b9a\u5bfe\u8c61\u306b\u8150\u98df\u6027\u7269\u8cea\u304c\u542b\u307e\u308c\u308b\u5834\u5408\u306f\u3001\u305d\u308c\u306b\u8010\u3048\u308b\u6750\u8cea\u306e\u30bb\u30f3\u30b5\u3092\u9078\u3076\u304b\u3001\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u30b7\u30fc\u30eb\u306a\u3069\u3092\u4f7f\u7528\u3057\u3066\u76f4\u63a5\u63a5\u89e6\u3092\u907f\u3051\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">9<\/a>\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u5f37\u9178\u6027\u306e\u6db2\u4f53\u3092\u6e2c\u5b9a\u3059\u308b\u5834\u5408\u306f\u3001\u63a5\u6db2\u90e8\u306b\u30cf\u30b9\u30c6\u30ed\u30a4\u306a\u3069\u306e\u8010\u98df\u6027\u6750\u6599\u3092\u4f7f\u7528\u3057\u305f\u30bb\u30f3\u30b5\u304c\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.3.2 \u7c98\u6027\u7269\u8cea\u30fb\u56fa\u5f62\u7269\u3078\u306e\u5bfe\u5fdc<\/strong><\/h4>\n\n\n\n<p>\u7c98\u6027\u306e\u9ad8\u3044\u7269\u8cea\u3084\u56fa\u5f62\u7269\u3092\u542b\u3080\u6d41\u4f53\u3092\u6e2c\u5b9a\u3059\u308b\u5834\u5408\u3001\u30bb\u30f3\u30b5\u30dd\u30fc\u30c8\u306e\u8a70\u307e\u308a\u3084\u6c5a\u308c\u306b\u3088\u308b\u8aa4\u5dee\u304c\u751f\u3058\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u3088\u3046\u306a\u5834\u5408\u306f\u3001\u30d5\u30e9\u30c3\u30b7\u30e5\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u578b\u306e\u30bb\u30f3\u30b5\u3092\u4f7f\u7528\u3057\u305f\u308a\u3001\u5b9a\u671f\u7684\u306a\u6d17\u6d44\u30fb\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3092\u884c\u3063\u305f\u308a\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>10.4 \u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3068\u5b9a\u671f\u70b9\u691c<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.4.1 \u5b9a\u671f\u6821\u6b63<\/strong><\/h4>\n\n\n\n<p>\u9577\u671f\u9593\u4f7f\u7528\u3059\u308b\u30bb\u30f3\u30b5\u306f\u3001\u7d4c\u5e74\u5909\u5316\u306b\u3088\u3063\u3066\u7279\u6027\u304c\u5909\u308f\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u3001\u5b9a\u671f\u7684\u306a\u6821\u6b63\u3092\u884c\u3044\u3001\u7cbe\u5ea6\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u6821\u6b63\u306e\u983b\u5ea6\u306f\u7528\u9014\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u304c\u3001\u4e00\u822c\u7684\u306b\u306f\u534a\u5e74\u304b\u30891\u5e74\u306b1\u56de\u7a0b\u5ea6\u884c\u3044\u307e\u3059\u3002\u9ad8\u7cbe\u5ea6\u3092\u8981\u6c42\u3055\u308c\u308b\u7528\u9014\u3067\u306f\u3088\u308a\u983b\u7e41\u306a\u6821\u6b63\u304c\u5fc5\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.4.2 \u6d17\u6d44\u3068\u70b9\u691c<\/strong><\/h4>\n\n\n\n<p>\u63a5\u6db2\u90e8\u304c\u6c5a\u308c\u308b\u3068\u7279\u6027\u304c\u5909\u5316\u3059\u308b\u3053\u3068\u304c\u3042\u308b\u305f\u3081\u3001\u5b9a\u671f\u7684\u306a\u6d17\u6d44\u3068\u70b9\u691c\u304c\u5fc5\u8981\u3067\u3059\u3002\u7279\u306b\u98df\u54c1\u30fb\u533b\u85ac\u54c1\u7528\u9014\u3067\u306f\u885b\u751f\u9762\u304b\u3089\u3082\u91cd\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.4.3 \u4ea4\u63db\u90e8\u54c1\u306e\u6e96\u5099<\/strong><\/h4>\n\n\n\n<p>\u30b7\u30fc\u30eb\u6750\u3084O\u30ea\u30f3\u30b0\u306a\u3069\u306e\u6d88\u8017\u54c1\u306f\u5b9a\u671f\u7684\u306a\u4ea4\u63db\u304c\u5fc5\u8981\u3067\u3059\u3002\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u4e88\u5099\u306e\u30bb\u30f3\u30b5\u3092\u7528\u610f\u3057\u3066\u304a\u304f\u3053\u3068\u3082\u691c\u8a0e\u3059\u3079\u304d\u3067\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.5 \u53d6\u308a\u4ed8\u3051\u30fb\u53d6\u308a\u5916\u3057\u6642\u306e\u6ce8\u610f<\/strong><\/h4>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.5.1 \u9069\u5207\u306a\u5de5\u5177\u306e\u4f7f\u7528<\/strong><\/h4>\n\n\n\n<p>\u30bb\u30f3\u30b5\u306e\u53d6\u308a\u4ed8\u3051\u30fb\u53d6\u308a\u5916\u3057\u306b\u306f\u9069\u5207\u306a\u5de5\u5177\u3092\u4f7f\u7528\u3057\u3001\u904e\u5ea6\u306a\u529b\u3092\u304b\u3051\u306a\u3044\u3088\u3046\u306b\u3057\u307e\u3059\u3002\u7279\u306b\u516d\u89d2\u90e8\u5206\u306b\u7121\u7406\u306a\u529b\u3092\u304b\u3051\u308b\u3068\u3001\u30bb\u30f3\u30b5\u5185\u90e8\u306b\u5fdc\u529b\u304c\u304b\u304b\u308a\u7279\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>10.5.2 \u30b7\u30fc\u30eb\u65b9\u6cd5<\/strong><\/h4>\n\n\n\n<p>\u306d\u3058\u90e8\u306e\u30b7\u30fc\u30eb\u306b\u306f\u9069\u5207\u306a\u65b9\u6cd5\uff08\u30c6\u30d5\u30ed\u30f3\u30c6\u30fc\u30d7\u3001\u30b7\u30fc\u30eb\u5264\u306a\u3069\uff09\u3092\u4f7f\u7528\u3057\u3001\u6f0f\u308c\u3092\u9632\u6b62\u3057\u307e\u3059\u3002\u305f\u3060\u3057\u3001\u30b7\u30fc\u30eb\u6750\u304c\u5727\u529b\u30dd\u30fc\u30c8\u306b\u5165\u308a\u8fbc\u307e\u306a\u3044\u3088\u3046\u306b\u6ce8\u610f\u304c\u5fc5\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>11. \u307e\u3068\u3081<\/strong><\/h2>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u306f\u3001\u6c17\u4f53\u3084\u6db2\u4f53\u306e\u5727\u529b\u3092\u96fb\u6c17\u4fe1\u53f7\u306b\u5909\u63db\u3059\u308b\u91cd\u8981\u306a\u30c7\u30d0\u30a4\u30b9\u3067\u3042\u308a\u3001\u81ea\u52d5\u8eca\u3001\u533b\u7642\u3001\u7523\u696d\u6a5f\u5668\u306a\u3069\u5e45\u5e83\u3044\u5206\u91ce\u3067\u6d3b\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>11.1 \u5727\u529b\u30bb\u30f3\u30b5\u306e\u767a\u5c55\u3068\u91cd\u8981\u6027<\/strong><\/h3>\n\n\n\n<p>\u5727\u529b\u6e2c\u5b9a\u306e\u6b74\u53f2\u306f17\u4e16\u7d00\u306e\u30c8\u30ea\u30c1\u30a7\u30ea\u306e\u6c34\u9280\u6c17\u5727\u8a08\u306b\u59cb\u307e\u308a\u3001\u534a\u5c0e\u4f53\u6280\u8853\u306e\u767a\u5c55\u3068\u3068\u3082\u306b1960\u5e74\u4ee3\u304b\u3089\u534a\u5c0e\u4f53\u5727\u529b\u30bb\u30f3\u30b5\u304c\u958b\u767a\u3055\u308c\u307e\u3057\u305f<a href=\"https:\/\/sts.kahaku.go.jp\/diversity\/document\/system\/pdf\/062.pdf\">2<\/a><a href=\"https:\/\/www.denso.com\/jp\/ja\/-\/media\/global\/business\/innovation\/review\/17\/17-doc-3-ja.pdf\">18<\/a><a href=\"https:\/\/www.ieice-hbkb.org\/files\/10\/10gun_08hen_02.pdf\">19<\/a>\u3002\u73fe\u5728\u3067\u306f\u3001MEMS\u6280\u8853\u3092\u7528\u3044\u305f\u5c0f\u578b\u30fb\u9ad8\u6027\u80fd\u306a\u30bb\u30f3\u30b5\u304c\u5e83\u304f\u666e\u53ca\u3057\u3066\u3044\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a><a href=\"https:\/\/product.minebeamitsumi.com\/tech\/mems\/case_studies\/pressure_sensor.html\">14<\/a>\u3002<\/p>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u306f\u69d8\u3005\u306a\u6a5f\u5668\u3084\u30b7\u30b9\u30c6\u30e0\u306e\u4e2d\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u304a\u308a\u3001\u5de5\u696d\u30d7\u30ed\u30bb\u30b9\u306e\u5236\u5fa1\u3001\u5b89\u5168\u76e3\u8996\u3001\u533b\u7642\u6a5f\u5668\u3001\u74b0\u5883\u8a08\u6e2c\u306a\u3069\u3001\u73fe\u4ee3\u793e\u4f1a\u306e\u30a4\u30f3\u30d5\u30e9\u3092\u652f\u3048\u308b\u4e0d\u53ef\u6b20\u306a\u8981\u7d20\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>11.2 \u5727\u529b\u30bb\u30f3\u30b5\u306e\u9078\u629e\u306e\u91cd\u8981\u6027<\/strong><\/h3>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u306b\u306f\u30d4\u30a8\u30be\u62b5\u6297\u5f0f\u3001\u9759\u96fb\u5bb9\u91cf\u5f0f\u3001\u5727\u96fb\u7d20\u5b50\u5f0f\u3001\u5149\u5b66\u5f0f\u306a\u3069\u69d8\u3005\u306a\u7a2e\u985e\u304c\u3042\u308a\u3001\u305d\u308c\u305e\u308c\u7279\u5fb4\u3068\u9069\u3057\u305f\u7528\u9014\u304c\u3042\u308a\u307e\u3059<a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">3<\/a><a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">4<\/a>\u3002\u30bb\u30f3\u30b5\u306e\u9078\u5b9a\u306b\u306f\u6e2c\u5b9a\u7bc4\u56f2\u3001\u7cbe\u5ea6\u3001\u5fdc\u7b54\u901f\u5ea6\u3001\u8010\u74b0\u5883\u6027\u306a\u3069\u591a\u304f\u306e\u8981\u7d20\u3092\u8003\u616e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059<a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">9<\/a>\u3002<\/p>\n\n\n\n<p>\u9069\u5207\u306a\u30bb\u30f3\u30b5\u306e\u9078\u629e\u306f\u6e2c\u5b9a\u306e\u7cbe\u5ea6\u3068\u4fe1\u983c\u6027\u306b\u76f4\u7d50\u3059\u308b\u305f\u3081\u3001\u7528\u9014\u306b\u6700\u9069\u306a\u30bb\u30f3\u30b5\u3092\u9078\u3076\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002\u30b3\u30b9\u30c8\u3060\u3051\u3067\u306a\u304f\u3001\u9577\u671f\u7684\u306a\u5b89\u5b9a\u6027\u3084\u4fe1\u983c\u6027\u3082\u8003\u616e\u306b\u5165\u308c\u308b\u3079\u304d\u3067\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>11.3 \u9069\u5207\u306a\u4f7f\u7528\u65b9\u6cd5\u3068\u6ce8\u610f\u70b9<\/strong><\/h3>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u3092\u52b9\u679c\u7684\u306b\u4f7f\u7528\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u6b63\u3057\u3044\u53d6\u308a\u4ed8\u3051\u65b9\u6cd5\u3001\u914d\u7dda\u3001\u6821\u6b63\u306a\u3069\u306e\u57fa\u672c\u7684\u306a\u77e5\u8b58\u304c\u5fc5\u8981\u3067\u3059\u3002\u307e\u305f\u3001\u904e\u8ca0\u8377\u306e\u9632\u6b62\u3001\u74b0\u5883\u6761\u4ef6\u3078\u306e\u914d\u616e\u3001\u5b9a\u671f\u7684\u306a\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u306a\u3069\u3001\u69d8\u3005\u306a\u6ce8\u610f\u70b9\u306b\u3082\u7559\u610f\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u30bb\u30f3\u30b5\u306e\u80fd\u529b\u3092\u6700\u5927\u9650\u306b\u5f15\u304d\u51fa\u3057\u3001\u9577\u671f\u9593\u5b89\u5b9a\u3057\u3066\u4f7f\u7528\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u3053\u308c\u3089\u306e\u70b9\u306b\u6ce8\u610f\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>11.4 \u4eca\u5f8c\u306e\u5c55\u671b<\/strong><\/h3>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u6280\u8853\u306f\u4eca\u5f8c\u3082\u9032\u5316\u3057\u7d9a\u3051\u308b\u3068\u4e88\u60f3\u3055\u308c\u307e\u3059\u3002\u5c0f\u578b\u5316\u3001\u4f4e\u6d88\u8cbb\u96fb\u529b\u5316\u3001\u9ad8\u7cbe\u5ea6\u5316\u3001\u591a\u6a5f\u80fd\u5316\u306a\u3069\u304c\u9032\u307f\u3001IoT\uff08Internet of Things\uff09\u6642\u4ee3\u306b\u304a\u3051\u308b\u91cd\u8981\u306a\u30bb\u30f3\u30b7\u30f3\u30b0\u30c7\u30d0\u30a4\u30b9\u3068\u3057\u3066\u306e\u5f79\u5272\u304c\u3055\u3089\u306b\u62e1\u5927\u3057\u3066\u3044\u304f\u3067\u3057\u3087\u3046\u3002<\/p>\n\n\n\n<p>\u307e\u305f\u3001\u4eba\u5de5\u77e5\u80fd\uff08AI\uff09\u3068\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u3088\u308a\u3001\u30bb\u30f3\u30b5\u30c7\u30fc\u30bf\u304b\u3089\u3088\u308a\u9ad8\u5ea6\u306a\u60c5\u5831\u62bd\u51fa\u3084\u4e88\u6e2c\u304c\u53ef\u80fd\u306b\u306a\u308b\u3068\u8003\u3048\u3089\u308c\u307e\u3059\u3002\u4f8b\u3048\u3070\u3001\u5727\u529b\u30d1\u30bf\u30fc\u30f3\u306e\u5206\u6790\u306b\u3088\u308b\u6a5f\u5668\u306e\u6545\u969c\u4e88\u77e5\u3084\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u306a\u3069\u304c\u5b9f\u73fe\u3059\u308b\u3067\u3057\u3087\u3046\u3002<\/p>\n\n\n\n<p>\u5727\u529b\u30bb\u30f3\u30b5\u306f\u5358\u306a\u308b\u6e2c\u5b9a\u88c5\u7f6e\u304b\u3089\u3001\u30b9\u30de\u30fc\u30c8\u30bb\u30f3\u30b7\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306e\u4e2d\u6838\u3078\u3068\u9032\u5316\u3092\u7d9a\u3051\u3066\u3044\u304f\u3068\u8003\u3048\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>Citations:<\/strong><\/h3>\n\n\n\n<ol class=\"wp-block-list\">\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/00aed86a10d2031d3a8dd7cc71495c8e0e88dd3d\">https:\/\/www.semanticscholar.org\/paper\/00aed86a10d2031d3a8dd7cc71495c8e0e88dd3d<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/sts.kahaku.go.jp\/diversity\/document\/system\/pdf\/062.pdf\">https:\/\/sts.kahaku.go.jp\/diversity\/document\/system\/pdf\/062.pdf<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/hkd.co.jp\/press\/press_tec\/\">https:\/\/hkd.co.jp\/press\/press_tec\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.fa.omron.co.jp\/data_pdf\/commentary\/pressure_tg_j_3_3.pdf\">https:\/\/www.fa.omron.co.jp\/data_pdf\/commentary\/pressure_tg_j_3_3.pdf<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.astina.co\/media\/5360\/\">https:\/\/www.astina.co\/media\/5360\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/\">https:\/\/www.yokogawa.co.jp\/solutions\/products-and-services\/measurement\/field-instruments-products\/micro-sensor-j\/fp-series-micro-sensor-j\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/\">https:\/\/www.yokogawa.co.jp\/library\/resources\/faqs\/field-instruments-j-msensor-faq-basic-4\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/ffc822d2701bf5f7908e5954c932e0e570936c85\">https:\/\/www.semanticscholar.org\/paper\/ffc822d2701bf5f7908e5954c932e0e570936c85<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/jp.rs-online.com\/web\/content\/discovery\/ideas-and-advice\/pressure-sensors-guide\">https:\/\/jp.rs-online.com\/web\/content\/discovery\/ideas-and-advice\/pressure-sensors-guide<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.kistler.com\/JP\/ja\/%E5%9C%A7%E9%9B%BB%E5%BC%8F%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%EF%BC%9A%E9%9B%BB%E8%8D%B7%E5%87%BA%E5%8A%9B%EF%BC%88pe%EF%BC%89-%E3%81%A8-%E9%9B%BB%E5%9C%A7%E5%87%BA%E5%8A%9B%EF%BC%88iepe%EF%BC%89\/C00000139\">https:\/\/www.kistler.com\/JP\/ja\/%E5%9C%A7%E9%9B%BB%E5%BC%8F%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%EF%BC%9A%E9%9B%BB%E8%8D%B7%E5%87%BA%E5%8A%9B%EF%BC%88pe%EF%BC%89-%E3%81%A8-%E9%9B%BB%E5%9C%A7%E5%87%BA%E5%8A%9B%EF%BC%88iepe%EF%BC%89\/C00000139<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/e25055460172d8896f82b6b6b76bd066f1d402f8\">https:\/\/www.semanticscholar.org\/paper\/e25055460172d8896f82b6b6b76bd066f1d402f8<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/product.minebeamitsumi.com\/tech\/mems\/case_studies\/pressure_sensor.html\">https:\/\/product.minebeamitsumi.com\/tech\/mems\/case_studies\/pressure_sensor.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.smcworld.com\/products\/pickup\/ja-jp\/switch_sensor\/output_form.html\">https:\/\/www.smcworld.com\/products\/pickup\/ja-jp\/switch_sensor\/output_form.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/29603b9bbca92290eb0abcd8928e3be7babbc521\">https:\/\/www.semanticscholar.org\/paper\/29603b9bbca92290eb0abcd8928e3be7babbc521<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/eb859a59585296ecf2c28a43cadc0da4d0c5820f\">https:\/\/www.semanticscholar.org\/paper\/eb859a59585296ecf2c28a43cadc0da4d0c5820f<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.denso.com\/jp\/ja\/-\/media\/global\/business\/innovation\/review\/17\/17-doc-3-ja.pdf\">https:\/\/www.denso.com\/jp\/ja\/-\/media\/global\/business\/innovation\/review\/17\/17-doc-3-ja.pdf<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.ieice-hbkb.org\/files\/10\/10gun_08hen_02.pdf\">https:\/\/www.ieice-hbkb.org\/files\/10\/10gun_08hen_02.pdf<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/merc.e.u-tokyo.ac.jp\/mmrc\/dp\/pdf\/MMRC87_2006.pdf\">https:\/\/merc.e.u-tokyo.ac.jp\/mmrc\/dp\/pdf\/MMRC87_2006.pdf<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/7ab66969a5bc5d52a2ec1c7664299c4b95148535\">https:\/\/www.semanticscholar.org\/paper\/7ab66969a5bc5d52a2ec1c7664299c4b95148535<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/6c02f29cc99911eedc0db2918fe850ec7c4702c7\">https:\/\/www.semanticscholar.org\/paper\/6c02f29cc99911eedc0db2918fe850ec7c4702c7<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.rohm.co.jp\/electronics-basics\/sensors\/sensor_what4\">https:\/\/www.rohm.co.jp\/electronics-basics\/sensors\/sensor_what4<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.ntech.t.u-tokyo.ac.jp\/press\/press_for_media\/NatureNano20160125\/img\/handout_jp.pdf\">https:\/\/www.ntech.t.u-tokyo.ac.jp\/press\/press_for_media\/NatureNano20160125\/img\/handout_jp.pdf<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.tdk.com\/ja\/tech-mag\/hatena\/045\">https:\/\/www.tdk.com\/ja\/tech-mag\/hatena\/045<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/\">https:\/\/www.krone.co.jp\/column\/2022\/04\/18\/pressure-sensor\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.fa.omron.co.jp\/data_pdf\/commentary\/pressure_tg_j_3_3.pdf\">https:\/\/www.fa.omron.co.jp\/data_pdf\/commentary\/pressure_tg_j_3_3.pdf<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.azbil.com\/jp\/corporate\/pr\/library\/review\/2023\/tech202304_01.html\">https:\/\/www.azbil.com\/jp\/corporate\/pr\/library\/review\/2023\/tech202304_01.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/ja.wikipedia.org\/wiki\/%E5%9C%A7%E5%8A%9B%E6%B8%AC%E5%AE%9A\">https:\/\/ja.wikipedia.org\/wiki\/%E5%9C%A7%E5%8A%9B%E6%B8%AC%E5%AE%9A<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.jstage.jst.go.jp\/article\/ieejjournal\/129\/5\/129_5_307\/_pdf\">https:\/\/www.jstage.jst.go.jp\/article\/ieejjournal\/129\/5\/129_5_307\/_pdf<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.jstage.jst.go.jp\/article\/ieejjournal1888\/102\/5\/102_5_371\/_pdf\">https:\/\/www.jstage.jst.go.jp\/article\/ieejjournal1888\/102\/5\/102_5_371\/_pdf<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/eetimes.itmedia.co.jp\/ee\/articles\/2201\/19\/news001.html\">https:\/\/eetimes.itmedia.co.jp\/ee\/articles\/2201\/19\/news001.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html\">https:\/\/www.fa.omron.co.jp\/guide\/technicalguide\/35\/28\/index.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/ea276d03ab4a47fb0555a6dcfd7a6ca8ec5e7d6b\">https:\/\/www.semanticscholar.org\/paper\/ea276d03ab4a47fb0555a6dcfd7a6ca8ec5e7d6b<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/dca782da3754d9452f15cdd5e59f29d2b5281cd7\">https:\/\/www.semanticscholar.org\/paper\/dca782da3754d9452f15cdd5e59f29d2b5281cd7<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.valcom.co.jp\/product\/pse\/principle\/\">https:\/\/www.valcom.co.jp\/product\/pse\/principle\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.mtasia.co.jp\/product\/pressure\/\">https:\/\/www.mtasia.co.jp\/product\/pressure\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.mohno-dispenser.jp\/compass\/compass21.html\">https:\/\/www.mohno-dispenser.jp\/compass\/compass21.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.smcworld.com\/products\/pickup\/ja-jp\/switch_sensor\/pressure_sensor.html\">https:\/\/www.smcworld.com\/products\/pickup\/ja-jp\/switch_sensor\/pressure_sensor.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.nidec-components.com\/j\/featuring\/pressure-sensors\/\">https:\/\/www.nidec-components.com\/j\/featuring\/pressure-sensors\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.keyence.co.jp\/products\/process\/pressure\/\">https:\/\/www.keyence.co.jp\/products\/process\/pressure\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.hbm.com\/jp\/7881\/how-does-a-strain-gauge-based-pressure-transducer-work\/\">https:\/\/www.hbm.com\/jp\/7881\/how-does-a-strain-gauge-based-pressure-transducer-work\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/2c2e63df6502b9af414ed3f9785beffc3639a18f\">https:\/\/www.semanticscholar.org\/paper\/2c2e63df6502b9af414ed3f9785beffc3639a18f<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/b4f5b45caa3e47e27f17fab45a44483ab40f47c0\">https:\/\/www.semanticscholar.org\/paper\/b4f5b45caa3e47e27f17fab45a44483ab40f47c0<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.fa.omron.co.jp\/product\/cautions\/35\/29\/index.html\">https:\/\/www.fa.omron.co.jp\/product\/cautions\/35\/29\/index.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.pisco.co.jp\/product\/p\/p05\/\">https:\/\/www.pisco.co.jp\/product\/p\/p05\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.fa.omron.co.jp\/products\/family\/507\/specification.html\">https:\/\/www.fa.omron.co.jp\/products\/family\/507\/specification.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.smcworld.com\/products\/pickup\/ja-jp\/switch_sensor\/p_config.html\">https:\/\/www.smcworld.com\/products\/pickup\/ja-jp\/switch_sensor\/p_config.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.valcom.co.jp\/product\/pse\/caution.html\">https:\/\/www.valcom.co.jp\/product\/pse\/caution.html<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/jp.misumi-ec.com\/vona2\/result\/?seriesPage=1\">https:\/\/jp.misumi-ec.com\/vona2\/result\/?seriesPage=1<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.keyence.co.jp\/products\/process\/pressure\/gp-m\/\">https:\/\/www.keyence.co.jp\/products\/process\/pressure\/gp-m\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.sankyointernational.co.jp\/media\/technology\/a78\">https:\/\/www.sankyointernational.co.jp\/media\/technology\/a78<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.rkcinst.co.jp\/faq\/480882\/\">https:\/\/www.rkcinst.co.jp\/faq\/480882\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.valcom.co.jp\/product\/pse\/p2va2\/\">https:\/\/www.valcom.co.jp\/product\/pse\/p2va2\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/c342bef372562543ea07e90b40b38df95f45f91a\">https:\/\/www.semanticscholar.org\/paper\/c342bef372562543ea07e90b40b38df95f45f91a<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/14b90c12df7eb6915b7e4cbc21f220c4b745239a\">https:\/\/www.semanticscholar.org\/paper\/14b90c12df7eb6915b7e4cbc21f220c4b745239a<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/68302458fb6a650d6b8b768f1e9924284c68078f\">https:\/\/www.semanticscholar.org\/paper\/68302458fb6a650d6b8b768f1e9924284c68078f<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/all-device.com\/%E3%82%B7%E3%83%AA%E3%82%B3%E3%83%B3%E3%83%90%E3%83%AC%E3%83%BC%E3%81%AB%E3%81%8A%E3%81%91%E3%82%8B%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%E3%83%BC%E3%81%AE%E6%AD%B4%E5%8F%B2\">https:\/\/all-device.com\/%E3%82%B7%E3%83%AA%E3%82%B3%E3%83%B3%E3%83%90%E3%83%AC%E3%83%BC%E3%81%AB%E3%81%8A%E3%81%91%E3%82%8B%E5%9C%A7%E5%8A%9B%E3%82%BB%E3%83%B3%E3%82%B5%E3%83%BC%E3%81%AE%E6%AD%B4%E5%8F%B2<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.keyence.co.jp\/ss\/general\/automotive-manufacturing\/006\/\">https:\/\/www.keyence.co.jp\/ss\/general\/automotive-manufacturing\/006\/<\/a><\/li>\n\n\n\n<li><a href=\"http:\/\/jglobal.jst.go.jp\/public\/20090422\/201302264786391930\">http:\/\/jglobal.jst.go.jp\/public\/20090422\/201302264786391930<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.jstage.jst.go.jp\/article\/ieejsmas\/134\/7\/134_181\/_pdf\">https:\/\/www.jstage.jst.go.jp\/article\/ieejsmas\/134\/7\/134_181\/_pdf<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/1d6f91e36e949b67d2fa5410fbb102db0049ceac\">https:\/\/www.semanticscholar.org\/paper\/1d6f91e36e949b67d2fa5410fbb102db0049ceac<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/9fb29e34ccb93ddde8c4c21a797e01be724bea59\">https:\/\/www.semanticscholar.org\/paper\/9fb29e34ccb93ddde8c4c21a797e01be724bea59<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/ffc822d2701bf5f7908e5954c932e0e570936c85\">https:\/\/www.semanticscholar.org\/paper\/ffc822d2701bf5f7908e5954c932e0e570936c85<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/df6735bdb8522c34143e2acd65d7b0e5a827d39b\">https:\/\/www.semanticscholar.org\/paper\/df6735bdb8522c34143e2acd65d7b0e5a827d39b<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/d9fd8a4e6d43c0c9b1460d1f0c709434b5d81ae0\">https:\/\/www.semanticscholar.org\/paper\/d9fd8a4e6d43c0c9b1460d1f0c709434b5d81ae0<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/e2173b7471e66cf62a35286ec46f7be95d539701\">https:\/\/www.semanticscholar.org\/paper\/e2173b7471e66cf62a35286ec46f7be95d539701<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/df46e89be525962bfaca6900ff7869135e27b14a\">https:\/\/www.semanticscholar.org\/paper\/df46e89be525962bfaca6900ff7869135e27b14a<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/e54979747050a65c26d87cbadb492751eecbf26b\">https:\/\/www.semanticscholar.org\/paper\/e54979747050a65c26d87cbadb492751eecbf26b<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.astina.co\/media\/5360\/\">https:\/\/www.astina.co\/media\/5360\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/fa-products.jp\/column\/pressure-sensor-guide\/\">https:\/\/fa-products.jp\/column\/pressure-sensor-guide\/<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/product.kyowa-ei.com\/products\/pressure-transducers\">https:\/\/product.kyowa-ei.com\/products\/pressure-transducers<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/8b96a78798bfae41e1ae1a6baaaa9b77ed6da72f\">https:\/\/www.semanticscholar.org\/paper\/8b96a78798bfae41e1ae1a6baaaa9b77ed6da72f<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/5e8647e49aa897cca4a3775c7b7f616fd6d831c0\">https:\/\/www.semanticscholar.org\/paper\/5e8647e49aa897cca4a3775c7b7f616fd6d831c0<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/0ffc68929119a8c4ddad42f157635c8950f4f7c3\">https:\/\/www.semanticscholar.org\/paper\/0ffc68929119a8c4ddad42f157635c8950f4f7c3<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/www.semanticscholar.org\/paper\/53fbdc0944ba048e042f4838d51e1cf89189b9af\">https:\/\/www.semanticscholar.org\/paper\/53fbdc0944ba048e042f4838d51e1cf89189b9af<\/a><\/li>\n\n\n\n<li><a 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